X-ray spectromicroscopy with a zone plate generated microprobe

The scanning photoelectron microscope at the National Synchrotron Light Source (NSLS) has recently recorded micrographs with a resolution below half a micron. To demonstrate elemental and chemical sensitivity at the submicron level, an artificial structure consisting of Al and SiO2 lines on a boron-...

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Veröffentlicht in:	Applied physics letters 1990-05, Vol.56 (19), p.1841-1843
Hauptverfasser:	Ade, Harald, Kirz, Janos, Hulbert, Steven L., Johnson, Erik D., Anderson, Erik, Kern, Dieter
Format:	Artikel
Sprache:	eng
Schlagworte:	440800 > Miscellaneous Instrumentation-- (1990-) ACCELERATORS ALUMINIUM CHALCOGENIDES CYCLIC ACCELERATORS ELECTRICAL EQUIPMENT ELECTROMAGNETS ELECTRON MICROSCOPES ELECTRON MICROSCOPY ELECTRON SPECTROSCOPY ELEMENTS MAGNETS METALS MICROSCOPES MICROSCOPY MINERALS NSLS OTHER INSTRUMENTATION OXIDE MINERALS OXIDES OXYGEN COMPOUNDS PHOTOELECTRON SPECTROSCOPY RADIATION SOURCES RESOLUTION SCANNING ELECTRON MICROSCOPY SILICA SILICON COMPOUNDS SILICON OXIDES SPATIAL RESOLUTION SPECTROSCOPY SYNCHROTRON RADIATION SOURCES SYNCHROTRONS 440600 > Optical Instrumentation-- (1990-) WIGGLER MAGNETS X-RAY EQUIPMENT
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