X-ray Diffraction Analysis of the Pyrolytic Conversion of Perhydropolysilazane into Silicon Nitride
A detailed investigation using X‐ray diffraction and other supportive techniques was performed on a preceramic polysilazane to study its pyrolytic conversion to silicon nitride (Si3N4). Analytical techniques were developed to determine the volumetric degree of crystallinity with respect to pyrolysis...
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Veröffentlicht in: | Journal of the American Ceramic Society 1994-07, Vol.77 (7), p.1729-1739 |
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creator | Blanchard, Cheryl R. Schwab, Stuart T. |
description | A detailed investigation using X‐ray diffraction and other supportive techniques was performed on a preceramic polysilazane to study its pyrolytic conversion to silicon nitride (Si3N4). Analytical techniques were developed to determine the volumetric degree of crystallinity with respect to pyrolysis temperature. Quantitative data for crystallite size, phase composition, and degree of crystallinity versus pyrolysis temperature and atmosphere (nitrogen and ammonia) are presented. Pyrolytic products produced under nitrogen and ammonia atmospheres consist of microcrystals of silicon, α‐Si3N4, and β‐Si3N4. Under both atmospheres, a majority of the char is crystalline at ≅1270°C, and the entire char is crystallized at 1400°C. Pyrolysis under an ammonia atmosphere produces nearly stoichiometric Si3N4, while pyrolysis under nitrogen produces silicon‐rich material. |
doi_str_mv | 10.1111/j.1151-2916.1994.tb07043.x |
format | Article |
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Analytical techniques were developed to determine the volumetric degree of crystallinity with respect to pyrolysis temperature. Quantitative data for crystallite size, phase composition, and degree of crystallinity versus pyrolysis temperature and atmosphere (nitrogen and ammonia) are presented. Pyrolytic products produced under nitrogen and ammonia atmospheres consist of microcrystals of silicon, α‐Si3N4, and β‐Si3N4. Under both atmospheres, a majority of the char is crystalline at ≅1270°C, and the entire char is crystallized at 1400°C. Pyrolysis under an ammonia atmosphere produces nearly stoichiometric Si3N4, while pyrolysis under nitrogen produces silicon‐rich material.</description><identifier>ISSN: 0002-7820</identifier><identifier>EISSN: 1551-2916</identifier><identifier>DOI: 10.1111/j.1151-2916.1994.tb07043.x</identifier><identifier>CODEN: JACTAW</identifier><language>eng</language><publisher>Oxford, UK: Blackwell Publishing Ltd</publisher><subject>360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication ; 400201 - Chemical & Physicochemical Properties ; AMMONIA ; Applied sciences ; CERAMICS ; CHEMICAL REACTIONS ; Chemical reactions and properties ; CRYSTAL STRUCTURE ; DECOMPOSITION ; Degradation ; Exact sciences and technology ; FABRICATION ; HYDRIDES ; HYDROGEN COMPOUNDS ; INORGANIC POLYMERS ; INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY ; MATERIALS SCIENCE ; NITRIDES ; NITROGEN COMPOUNDS ; NITROGEN HYDRIDES ; Organic polymers ; Physicochemistry of polymers ; PNICTIDES ; POLYMERS ; PYROLYSIS ; PYROLYSIS PRODUCTS ; SILICON COMPOUNDS ; SILICON NITRIDES ; THERMOCHEMICAL PROCESSES</subject><ispartof>Journal of the American Ceramic Society, 1994-07, Vol.77 (7), p.1729-1739</ispartof><rights>1994 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c4439-4674cd92424a2b47357b2b8f0c21468bda05d5a0bc72081a681ae6e4c6ee066f3</citedby><cites>FETCH-LOGICAL-c4439-4674cd92424a2b47357b2b8f0c21468bda05d5a0bc72081a681ae6e4c6ee066f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1111%2Fj.1151-2916.1994.tb07043.x$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1111%2Fj.1151-2916.1994.tb07043.x$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>230,314,780,784,885,1417,27924,27925,45574,45575</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=4139045$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.osti.gov/biblio/7039940$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Blanchard, Cheryl R.</creatorcontrib><creatorcontrib>Schwab, Stuart T.</creatorcontrib><title>X-ray Diffraction Analysis of the Pyrolytic Conversion of Perhydropolysilazane into Silicon Nitride</title><title>Journal of the American Ceramic Society</title><description>A detailed investigation using X‐ray diffraction and other supportive techniques was performed on a preceramic polysilazane to study its pyrolytic conversion to silicon nitride (Si3N4). Analytical techniques were developed to determine the volumetric degree of crystallinity with respect to pyrolysis temperature. Quantitative data for crystallite size, phase composition, and degree of crystallinity versus pyrolysis temperature and atmosphere (nitrogen and ammonia) are presented. Pyrolytic products produced under nitrogen and ammonia atmospheres consist of microcrystals of silicon, α‐Si3N4, and β‐Si3N4. Under both atmospheres, a majority of the char is crystalline at ≅1270°C, and the entire char is crystallized at 1400°C. Pyrolysis under an ammonia atmosphere produces nearly stoichiometric Si3N4, while pyrolysis under nitrogen produces silicon‐rich material.</description><subject>360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication</subject><subject>400201 - Chemical & Physicochemical Properties</subject><subject>AMMONIA</subject><subject>Applied sciences</subject><subject>CERAMICS</subject><subject>CHEMICAL REACTIONS</subject><subject>Chemical reactions and properties</subject><subject>CRYSTAL STRUCTURE</subject><subject>DECOMPOSITION</subject><subject>Degradation</subject><subject>Exact sciences and technology</subject><subject>FABRICATION</subject><subject>HYDRIDES</subject><subject>HYDROGEN COMPOUNDS</subject><subject>INORGANIC POLYMERS</subject><subject>INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY</subject><subject>MATERIALS SCIENCE</subject><subject>NITRIDES</subject><subject>NITROGEN COMPOUNDS</subject><subject>NITROGEN HYDRIDES</subject><subject>Organic polymers</subject><subject>Physicochemistry of polymers</subject><subject>PNICTIDES</subject><subject>POLYMERS</subject><subject>PYROLYSIS</subject><subject>PYROLYSIS PRODUCTS</subject><subject>SILICON COMPOUNDS</subject><subject>SILICON NITRIDES</subject><subject>THERMOCHEMICAL PROCESSES</subject><issn>0002-7820</issn><issn>1551-2916</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1994</creationdate><recordtype>article</recordtype><recordid>eNqVkF1v0zAUhi0EEmXwH6IJcZfir9gJV5RuKx_TmPhQuTtyHEd18eJie9Dw63GUavdYso6s8_g9Rw9C5wQvST6v97lUpKQNEUvSNHyZWiwxZ8vjI7Qg1an1GC0wxrSUNcVP0bMY9_lJmpovkP5RBjUWF7bvg9LJ-qFYDcqN0cbC90XameJ2DN6Nyepi7YffJsQJyr1bE3ZjF_zBT7hTf9VgCjskX3y1zuoM3dgUbGeeoye9ctG8ONUz9P3q8tv6fXn9efNhvbouNeesKbmQXHcN5ZQr2nLJKtnStu6xpoSLuu0UrrpK4VZLimuiRL5GGK6FMViInp2h8znXx2QhapuM3uU9BqMTSMyyH5yhVzN0CP7XvYkJ7mzUxrm8vb-PQCXDtKmqDL6ZQR18jMH0cAj2ToURCIZJPuxhkg-TYZjkw0k-HPPnl6cpKmrlsttB2_iQwAlrMJ9mvJ2xP9aZ8T8GwMfV-pJI2uSIco6wMZnjQ4QKP0FIJivY3mzgC3_36WK72cIV-weJuqk4</recordid><startdate>199407</startdate><enddate>199407</enddate><creator>Blanchard, Cheryl R.</creator><creator>Schwab, Stuart T.</creator><general>Blackwell Publishing Ltd</general><general>Blackwell</general><scope>BSCLL</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope><scope>OTOTI</scope></search><sort><creationdate>199407</creationdate><title>X-ray Diffraction Analysis of the Pyrolytic Conversion of Perhydropolysilazane into Silicon Nitride</title><author>Blanchard, Cheryl R. ; Schwab, Stuart T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c4439-4674cd92424a2b47357b2b8f0c21468bda05d5a0bc72081a681ae6e4c6ee066f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1994</creationdate><topic>360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication</topic><topic>400201 - Chemical & Physicochemical Properties</topic><topic>AMMONIA</topic><topic>Applied sciences</topic><topic>CERAMICS</topic><topic>CHEMICAL REACTIONS</topic><topic>Chemical reactions and properties</topic><topic>CRYSTAL STRUCTURE</topic><topic>DECOMPOSITION</topic><topic>Degradation</topic><topic>Exact sciences and technology</topic><topic>FABRICATION</topic><topic>HYDRIDES</topic><topic>HYDROGEN COMPOUNDS</topic><topic>INORGANIC POLYMERS</topic><topic>INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY</topic><topic>MATERIALS SCIENCE</topic><topic>NITRIDES</topic><topic>NITROGEN COMPOUNDS</topic><topic>NITROGEN HYDRIDES</topic><topic>Organic polymers</topic><topic>Physicochemistry of polymers</topic><topic>PNICTIDES</topic><topic>POLYMERS</topic><topic>PYROLYSIS</topic><topic>PYROLYSIS PRODUCTS</topic><topic>SILICON COMPOUNDS</topic><topic>SILICON NITRIDES</topic><topic>THERMOCHEMICAL PROCESSES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Blanchard, Cheryl R.</creatorcontrib><creatorcontrib>Schwab, Stuart T.</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>OSTI.GOV</collection><jtitle>Journal of the American Ceramic Society</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Blanchard, Cheryl R.</au><au>Schwab, Stuart T.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>X-ray Diffraction Analysis of the Pyrolytic Conversion of Perhydropolysilazane into Silicon Nitride</atitle><jtitle>Journal of the American Ceramic Society</jtitle><date>1994-07</date><risdate>1994</risdate><volume>77</volume><issue>7</issue><spage>1729</spage><epage>1739</epage><pages>1729-1739</pages><issn>0002-7820</issn><eissn>1551-2916</eissn><coden>JACTAW</coden><abstract>A detailed investigation using X‐ray diffraction and other supportive techniques was performed on a preceramic polysilazane to study its pyrolytic conversion to silicon nitride (Si3N4). Analytical techniques were developed to determine the volumetric degree of crystallinity with respect to pyrolysis temperature. Quantitative data for crystallite size, phase composition, and degree of crystallinity versus pyrolysis temperature and atmosphere (nitrogen and ammonia) are presented. Pyrolytic products produced under nitrogen and ammonia atmospheres consist of microcrystals of silicon, α‐Si3N4, and β‐Si3N4. Under both atmospheres, a majority of the char is crystalline at ≅1270°C, and the entire char is crystallized at 1400°C. Pyrolysis under an ammonia atmosphere produces nearly stoichiometric Si3N4, while pyrolysis under nitrogen produces silicon‐rich material.</abstract><cop>Oxford, UK</cop><pub>Blackwell Publishing Ltd</pub><doi>10.1111/j.1151-2916.1994.tb07043.x</doi><tpages>11</tpages></addata></record> |
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subjects | 360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication 400201 - Chemical & Physicochemical Properties AMMONIA Applied sciences CERAMICS CHEMICAL REACTIONS Chemical reactions and properties CRYSTAL STRUCTURE DECOMPOSITION Degradation Exact sciences and technology FABRICATION HYDRIDES HYDROGEN COMPOUNDS INORGANIC POLYMERS INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY MATERIALS SCIENCE NITRIDES NITROGEN COMPOUNDS NITROGEN HYDRIDES Organic polymers Physicochemistry of polymers PNICTIDES POLYMERS PYROLYSIS PYROLYSIS PRODUCTS SILICON COMPOUNDS SILICON NITRIDES THERMOCHEMICAL PROCESSES |
title | X-ray Diffraction Analysis of the Pyrolytic Conversion of Perhydropolysilazane into Silicon Nitride |
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