Molecular-dynamics subplantation studies of carbon beneath the diamond (111) surface

The near-surface implantation of hyperthermal neutral carbon atoms of energy (15--75) eV onto a low-temperature diamond (111) substrate is studied by molecular dynamics using a density-functional-based nonorthogonal tight-binding scheme. Depending on the initial energy and the impact point, the atom...

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Veröffentlicht in:Physical review. B, Condensed matter Condensed matter, 1995-02, Vol.51 (7), p.4541-4546
Hauptverfasser: Uhlmann, S, Frauenheim, T, Stephan, U
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container_issue 7
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container_title Physical review. B, Condensed matter
container_volume 51
creator Uhlmann, S
Frauenheim, T
Stephan, U
description The near-surface implantation of hyperthermal neutral carbon atoms of energy (15--75) eV onto a low-temperature diamond (111) substrate is studied by molecular dynamics using a density-functional-based nonorthogonal tight-binding scheme. Depending on the initial energy and the impact point, the atoms penetrate beneath the exposed (111) surface forming regions of local disorder and stress. The energy partition during the collision is analyzed, yielding results about penetration and the displacement threshold. After a final relaxation of the structures we determine the penetration depth of the colliding particles. The structural topology and the electronic properties of the induced defects and surface modifications are discussed.
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ispartof Physical review. B, Condensed matter, 1995-02, Vol.51 (7), p.4541-4546
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language eng
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source American Physical Society Journals
subjects ATOM COLLISIONS
CARBON
COLLISIONS
COMPUTERIZED SIMULATION
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
DEFECTS
DIAMONDS
DISPLACEMENT RATES
ELECTRONIC STRUCTURE
ELEMENTAL MINERALS
ELEMENTS
ENERGY
ENERGY RANGE
EV RANGE
EV RANGE 10-100
MINERALS
NONMETALS
SIMULATION 665300 -- Interactions Between Beams & Condensed Matter-- (1992-)
STRESSES
THRESHOLD ENERGY
title Molecular-dynamics subplantation studies of carbon beneath the diamond (111) surface
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