Metalorganic Chemical Vapor Deposition of Tl sub 2 Ba sub 2 CaCu sub 2 O sub x Superconducting Thin Films Using Fluorinated beta -Diketonate Source Reagents
Superconducting Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were fabricated using a three-step process. Amorphous BaCaCuOF films were deposted on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 deg C using fluorinated beta -diketonate complexes of Ba, Ca, and Cu. T...
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| Veröffentlicht in: | Applied physics letters 1990-11, Vol.57 (20), p.2136-2138 |
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| container_title | Applied physics letters |
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| creator | Hamaguchi, N Gardiner, R Kirlin, P S Dye, R Hubbard, K M Muenchausen, R E |
| description | Superconducting Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were fabricated using a three-step process. Amorphous BaCaCuOF films were deposted on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 deg C using fluorinated beta -diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 deg C and c-axis oriented Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were then formed by annealing in dry O sub 2 at 870 deg C in the presence of Tl sub 2 O sub 3 /Ba sub 2 Ca sub 2 CuN sub 3 O sub x pellets. The best films showed onsets of superconductivity at 125K and zero resistivity was achieved by 108K. Critical current densities as high as 10 exp 4 A/cm exp 2 were obtained at 90K. Diffraction patterns, Graphs, Photomicrographs. 11 ref.--AA |
| doi_str_mv | 10.1063/1.104156 |
| format | Article |
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Amorphous BaCaCuOF films were deposted on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 deg C using fluorinated beta -diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 deg C and c-axis oriented Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were then formed by annealing in dry O sub 2 at 870 deg C in the presence of Tl sub 2 O sub 3 /Ba sub 2 Ca sub 2 CuN sub 3 O sub x pellets. The best films showed onsets of superconductivity at 125K and zero resistivity was achieved by 108K. Critical current densities as high as 10 exp 4 A/cm exp 2 were obtained at 90K. 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Amorphous BaCaCuOF films were deposted on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 deg C using fluorinated beta -diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 deg C and c-axis oriented Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were then formed by annealing in dry O sub 2 at 870 deg C in the presence of Tl sub 2 O sub 3 /Ba sub 2 Ca sub 2 CuN sub 3 O sub x pellets. The best films showed onsets of superconductivity at 125K and zero resistivity was achieved by 108K. Critical current densities as high as 10 exp 4 A/cm exp 2 were obtained at 90K. Diffraction patterns, Graphs, Photomicrographs. 11 ref.--AA</description><subject>360204 -- Ceramics, Cermets, & Refractories-- Physical Properties</subject><subject>ALKALINE EARTH METAL COMPOUNDS</subject><subject>ANNEALING</subject><subject>BARIUM COMPOUNDS</subject><subject>BARIUM OXIDES</subject><subject>CALCIUM COMPOUNDS</subject><subject>CALCIUM OXIDES</subject><subject>CHALCOGENIDES</subject><subject>CHEMICAL COATING</subject><subject>CHEMICAL VAPOR DEPOSITION</subject><subject>COPPER COMPOUNDS</subject><subject>COPPER OXIDES</subject><subject>CRITICAL CURRENT</subject><subject>CURRENTS</subject><subject>DEPOSITION</subject><subject>ELECTRIC CURRENTS</subject><subject>HEAT TREATMENTS</subject><subject>HIGH-TC SUPERCONDUCTORS</subject><subject>LASL</subject><subject>MATERIALS SCIENCE</subject><subject>NATIONAL ORGANIZATIONS</subject><subject>OXIDES</subject><subject>OXYGEN COMPOUNDS</subject><subject>PHYSICAL PROPERTIES</subject><subject>SUPERCONDUCTING FILMS</subject><subject>SUPERCONDUCTORS</subject><subject>SURFACE COATING</subject><subject>THALLIUM COMPOUNDS</subject><subject>THALLIUM OXIDES</subject><subject>THERMODYNAMIC PROPERTIES</subject><subject>TRANSITION ELEMENT COMPOUNDS</subject><subject>TRANSITION TEMPERATURE</subject><subject>US AEC</subject><subject>US DOE</subject><subject>US ERDA</subject><subject>US ORGANIZATIONS 360202 -- Ceramics, Cermets, & Refractories-- Structure & Phase Studies</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1990</creationdate><recordtype>article</recordtype><recordid>eNotkM1OwzAQhC0EEqUg8QgWB24B_8T5OUKggFRUiQaukWNvW0Nqh9iWeBgelpT29M2ORruaReiSkhtKMn5LR6RUZEdoQkmeJ5zS4hhNCCE8yUpBT9GZ95_jKBjnE_T7CkF2blhLaxSuNrA1Snb4Q_ZuwA_QO2-CcRa7Fa477GOLGb6XB1HJKh7k4p8_eBl7GJSzOqpg7BrXG2PxzHRbj9_9zph10Q3GygAat-NtnDyYLwhu5-Cli4MC_AZyDTb4c3Sykp2HiwOnqJ491tVzMl88vVR388SJgiU5z4QWhGlV5gq0kClIKlLOCtJSQWQLIHXJaEFWpQBdpkrQVKVtKXjLeKH5FF3t1zofTOOVCaA2YwcLKjQZK0mWFmPoeh_qB_cdwYdma7yCrpMWXPQNE3lG2fjUP7rMdYo</recordid><startdate>19901112</startdate><enddate>19901112</enddate><creator>Hamaguchi, N</creator><creator>Gardiner, R</creator><creator>Kirlin, P S</creator><creator>Dye, R</creator><creator>Hubbard, K M</creator><creator>Muenchausen, R E</creator><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope><scope>OTOTI</scope></search><sort><creationdate>19901112</creationdate><title>Metalorganic Chemical Vapor Deposition of Tl sub 2 Ba sub 2 CaCu sub 2 O sub x Superconducting Thin Films Using Fluorinated beta -Diketonate Source Reagents</title><author>Hamaguchi, N ; Gardiner, R ; Kirlin, P S ; Dye, R ; Hubbard, K M ; Muenchausen, R E</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-o582-7365d502dc97ced5a4ea1543280b150abeead92180f95ed94c514c4b953b238d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1990</creationdate><topic>360204 -- Ceramics, Cermets, & Refractories-- Physical Properties</topic><topic>ALKALINE EARTH METAL COMPOUNDS</topic><topic>ANNEALING</topic><topic>BARIUM COMPOUNDS</topic><topic>BARIUM OXIDES</topic><topic>CALCIUM COMPOUNDS</topic><topic>CALCIUM OXIDES</topic><topic>CHALCOGENIDES</topic><topic>CHEMICAL COATING</topic><topic>CHEMICAL VAPOR DEPOSITION</topic><topic>COPPER COMPOUNDS</topic><topic>COPPER OXIDES</topic><topic>CRITICAL CURRENT</topic><topic>CURRENTS</topic><topic>DEPOSITION</topic><topic>ELECTRIC CURRENTS</topic><topic>HEAT TREATMENTS</topic><topic>HIGH-TC SUPERCONDUCTORS</topic><topic>LASL</topic><topic>MATERIALS SCIENCE</topic><topic>NATIONAL ORGANIZATIONS</topic><topic>OXIDES</topic><topic>OXYGEN COMPOUNDS</topic><topic>PHYSICAL PROPERTIES</topic><topic>SUPERCONDUCTING FILMS</topic><topic>SUPERCONDUCTORS</topic><topic>SURFACE COATING</topic><topic>THALLIUM COMPOUNDS</topic><topic>THALLIUM OXIDES</topic><topic>THERMODYNAMIC PROPERTIES</topic><topic>TRANSITION ELEMENT COMPOUNDS</topic><topic>TRANSITION TEMPERATURE</topic><topic>US AEC</topic><topic>US DOE</topic><topic>US ERDA</topic><topic>US ORGANIZATIONS 360202 -- Ceramics, Cermets, & Refractories-- Structure & Phase Studies</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hamaguchi, N</creatorcontrib><creatorcontrib>Gardiner, R</creatorcontrib><creatorcontrib>Kirlin, P S</creatorcontrib><creatorcontrib>Dye, R</creatorcontrib><creatorcontrib>Hubbard, K M</creatorcontrib><creatorcontrib>Muenchausen, R E</creatorcontrib><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hamaguchi, N</au><au>Gardiner, R</au><au>Kirlin, P S</au><au>Dye, R</au><au>Hubbard, K M</au><au>Muenchausen, R E</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Metalorganic Chemical Vapor Deposition of Tl sub 2 Ba sub 2 CaCu sub 2 O sub x Superconducting Thin Films Using Fluorinated beta -Diketonate Source Reagents</atitle><jtitle>Applied physics letters</jtitle><date>1990-11-12</date><risdate>1990</risdate><volume>57</volume><issue>20</issue><spage>2136</spage><epage>2138</epage><pages>2136-2138</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>Superconducting Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were fabricated using a three-step process. Amorphous BaCaCuOF films were deposted on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 deg C using fluorinated beta -diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 deg C and c-axis oriented Tl sub 2 Ba sub 2 CaCu sub 2 O sub x films were then formed by annealing in dry O sub 2 at 870 deg C in the presence of Tl sub 2 O sub 3 /Ba sub 2 Ca sub 2 CuN sub 3 O sub x pellets. The best films showed onsets of superconductivity at 125K and zero resistivity was achieved by 108K. Critical current densities as high as 10 exp 4 A/cm exp 2 were obtained at 90K. Diffraction patterns, Graphs, Photomicrographs. 11 ref.--AA</abstract><cop>United States</cop><doi>10.1063/1.104156</doi><tpages>3</tpages></addata></record> |
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| ispartof | Applied physics letters, 1990-11, Vol.57 (20), p.2136-2138 |
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| source | AIP Digital Archive |
| subjects | 360204 -- Ceramics, Cermets, & Refractories-- Physical Properties ALKALINE EARTH METAL COMPOUNDS ANNEALING BARIUM COMPOUNDS BARIUM OXIDES CALCIUM COMPOUNDS CALCIUM OXIDES CHALCOGENIDES CHEMICAL COATING CHEMICAL VAPOR DEPOSITION COPPER COMPOUNDS COPPER OXIDES CRITICAL CURRENT CURRENTS DEPOSITION ELECTRIC CURRENTS HEAT TREATMENTS HIGH-TC SUPERCONDUCTORS LASL MATERIALS SCIENCE NATIONAL ORGANIZATIONS OXIDES OXYGEN COMPOUNDS PHYSICAL PROPERTIES SUPERCONDUCTING FILMS SUPERCONDUCTORS SURFACE COATING THALLIUM COMPOUNDS THALLIUM OXIDES THERMODYNAMIC PROPERTIES TRANSITION ELEMENT COMPOUNDS TRANSITION TEMPERATURE US AEC US DOE US ERDA US ORGANIZATIONS 360202 -- Ceramics, Cermets, & Refractories-- Structure & Phase Studies |
| title | Metalorganic Chemical Vapor Deposition of Tl sub 2 Ba sub 2 CaCu sub 2 O sub x Superconducting Thin Films Using Fluorinated beta -Diketonate Source Reagents |
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