Characterization of atomic force microscope tips by adhesion force measurements
The resolution limit in an atomic force microscope image usually is attributed to the finite radius of the contacting probe. Here, it is shown that this assumption is valid only when adhesion forces are minimal. Relative to the tip-imposed geometrical limit, the resolution and contrast in AFM images...
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| Veröffentlicht in: | Applied physics letters 1993-10, Vol.63 (15), p.2150-2152 |
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| container_end_page | 2152 |
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| container_issue | 15 |
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| container_title | Applied physics letters |
| container_volume | 63 |
| creator | THUNDAT, T ZHENG, X.-Y CHEN, G. Y SHARP, S. L WARMACK, R. J SCHOWALTER, L. J |
| description | The resolution limit in an atomic force microscope image usually is attributed to the finite radius of the contacting probe. Here, it is shown that this assumption is valid only when adhesion forces are minimal. Relative to the tip-imposed geometrical limit, the resolution and contrast in AFM images can be degraded by increasing adhesion forces. The large adhesion forces observed for some tips at low humidity conditions are shown to be due to tip contamination or poorly formed tip apexes. Methods to determine and to reduce the extent of tip contamination are described. Cleaning carried out using UV-ozone or oxygen-plasma etching were found to significantly reduce the minimum adhesion force. |
| doi_str_mv | 10.1063/1.110569 |
| format | Article |
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Cleaning carried out using UV-ozone or oxygen-plasma etching were found to significantly reduce the minimum adhesion force.</description><subject>661200 - Techniques of General Use in Physics- (1992-)</subject><subject>ADHESION</subject><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><subject>CONTAMINATION</subject><subject>Electron, positron and ion microscopes, electron diffractometers and related techniques</subject><subject>Exact sciences and technology</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>MICROSCOPY</subject><subject>MORPHOLOGY</subject><subject>Physics</subject><subject>RESOLUTION</subject><subject>Scanning probe microscopes, components, and techniques</subject><subject>SPATIAL RESOLUTION</subject><subject>SURFACE FORCES</subject><subject>SURFACE PROPERTIES</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1993</creationdate><recordtype>article</recordtype><recordid>eNo90E1rwzAMBmAzNljXDfYTwthhl3RWlDj2cZR9QaGX3oPqKNSjjYPtHbpfv4SMnSTBg5BeIe5BrkAqfIYVgKyUuRALkHWdI4C-FAspJebKVHAtbmL8GseqQFyI7fpAgWzi4H4oOd9nvsso-ZOzWeeD5Wzsgo_WD5wlN8Rsf86oPXCc7J9git-BT9yneCuuOjpGvvurS7F7e92tP_LN9v1z_bLJbaEh5ZrBYKkVQ0s1FyXVEnXJihCoqrBVVitdaTCy2MuqJSgMSMSaNaNCiUvxMK_1MbkmWpfYHqzve7apUYWUxkzoaUbTAzFw1wzBnSicG5DNFFYDzRzWSB9nOlC0dOwC9dbFf4_jLUUJ-AvI4Gc0</recordid><startdate>19931011</startdate><enddate>19931011</enddate><creator>THUNDAT, T</creator><creator>ZHENG, X.-Y</creator><creator>CHEN, G. 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Y</creatorcontrib><creatorcontrib>SHARP, S. L</creatorcontrib><creatorcontrib>WARMACK, R. J</creatorcontrib><creatorcontrib>SCHOWALTER, L. J</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>THUNDAT, T</au><au>ZHENG, X.-Y</au><au>CHEN, G. Y</au><au>SHARP, S. L</au><au>WARMACK, R. J</au><au>SCHOWALTER, L. J</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Characterization of atomic force microscope tips by adhesion force measurements</atitle><jtitle>Applied physics letters</jtitle><date>1993-10-11</date><risdate>1993</risdate><volume>63</volume><issue>15</issue><spage>2150</spage><epage>2152</epage><pages>2150-2152</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>The resolution limit in an atomic force microscope image usually is attributed to the finite radius of the contacting probe. Here, it is shown that this assumption is valid only when adhesion forces are minimal. Relative to the tip-imposed geometrical limit, the resolution and contrast in AFM images can be degraded by increasing adhesion forces. The large adhesion forces observed for some tips at low humidity conditions are shown to be due to tip contamination or poorly formed tip apexes. Methods to determine and to reduce the extent of tip contamination are described. Cleaning carried out using UV-ozone or oxygen-plasma etching were found to significantly reduce the minimum adhesion force.</abstract><cop>Melville, NY</cop><pub>American Institute of Physics</pub><doi>10.1063/1.110569</doi><tpages>3</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 1993-10, Vol.63 (15), p.2150-2152 |
| issn | 0003-6951 1077-3118 |
| language | eng |
| recordid | cdi_osti_scitechconnect_6200990 |
| source | AIP Digital Archive |
| subjects | 661200 - Techniques of General Use in Physics- (1992-) ADHESION CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS CONTAMINATION Electron, positron and ion microscopes, electron diffractometers and related techniques Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy MICROSCOPY MORPHOLOGY Physics RESOLUTION Scanning probe microscopes, components, and techniques SPATIAL RESOLUTION SURFACE FORCES SURFACE PROPERTIES |
| title | Characterization of atomic force microscope tips by adhesion force measurements |
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