Scaling relations for strained-layer relaxation

Scaling relations for relaxation in strained-layer structures, based on simple descriptions of the dominant relaxation mechanisms and the influence of a stress-dependent relaxation activation energy, are obtained for general III-V semiconductor alloys. As a result, strained-layer relaxation in a giv...

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Veröffentlicht in:Applied physics letters 1989-09, Vol.55 (13), p.1345-1347
Hauptverfasser: DODSON, B. W, TSAO, J. Y
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container_title Applied physics letters
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creator DODSON, B. W
TSAO, J. Y
description Scaling relations for relaxation in strained-layer structures, based on simple descriptions of the dominant relaxation mechanisms and the influence of a stress-dependent relaxation activation energy, are obtained for general III-V semiconductor alloys. As a result, strained-layer relaxation in a given material system can be predicted over a wide range of structural parameters and temperature history based on a single relaxation measurement. This scaling treatment should prove useful in optimization of practical strained-layer device structures.
doi_str_mv 10.1063/1.101594
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ispartof Applied physics letters, 1989-09, Vol.55 (13), p.1345-1347
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1077-3118
language eng
recordid cdi_osti_scitechconnect_5650083
source AIP Digital Archive
subjects 360603 - Materials- Properties
ARSENIC COMPOUNDS
ARSENIDES
Condensed matter: structure, mechanical and thermal properties
CREEP
CRYSTAL DEFECTS
CRYSTAL GROWTH
CRYSTAL STRUCTURE
DEFORMATION
DESIGN
DIMENSIONS
DISLOCATIONS
Exact sciences and technology
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
INDIUM ARSENIDES
INDIUM COMPOUNDS
INTERFACES
LAYERS
LINE DEFECTS
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
MATERIALS SCIENCE
MECHANICAL PROPERTIES
NUCLEATION
OPTIMIZATION
Physics
PLASTICITY
PNICTIDES
RELAXATION
SCALING LAWS
STABILITY
STRAINS
STRESS RELAXATION
SUPERLATTICES
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
THICKNESS
title Scaling relations for strained-layer relaxation
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