Thermal conductivity of amorphous carbon thin films

Thermal conductivities Λ of amorphous carbon thin films are measured in the temperatures range 80–400 K using the 3ω method. Sample films range from soft a-C:H prepared by remote-plasma deposition (Λ=0.20 W m−1 K−1 at room temperature) to amorphous diamond with a large fraction of sp3 bonded carbon...

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Veröffentlicht in:	Journal of applied physics 2000-12, Vol.88 (11), p.6317-6320
Hauptverfasser:	Bullen, Andrew J., O’Hara, Keith E., Cahill, David G., Monteiro, Othon, von Keudell, Achim
Format:	Artikel
Sprache:	eng
Schlagworte:	CARBON CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS DEPOSITION DIAMONDS PHYSICS THERMAL CONDUCTIVITY THIN FILMS
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