Digital pixel test structures implemented in a 65 nm CMOS process
The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Activ...
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| Veröffentlicht in: | Nucl.Instrum.Meth.A 2023-11, Vol.1056, p.168589, Article 168589 |
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| creator | Aglieri Rinella, Gianluca Andronic, Anton Antonelli, Matias Aresti, Mauro Baccomi, Roberto Becht, Pascal Beole, Stefania Braach, Justus Buckland, Matthew Daniel Buschmann, Eric Camerini, Paolo Carnesecchi, Francesca Cecconi, Leonardo Charbon, Edoardo Contin, Giacomo Dannheim, Dominik de Melo, Joao Deng, Wenjing di Mauro, Antonello Hasenbichler, Jan Hillemanns, Hartmut Hong, Geun Hee Isakov, Artem Junique, Antoine Kluge, Alex Kotliarov, Artem Křížek, Filip Lautner, Lukas Mager, Magnus Marras, Davide Martinengo, Paolo Masciocchi, Silvia Menzel, Marius Wilm Munker, Magdalena Piro, Francesco Rachevski, Alexandre Rebane, Karoliina Reidt, Felix Russo, Roberto Sanna, Isabella Sarritzu, Valerio Senyukov, Serhiy Snoeys, Walter Sonneveld, Jory Šuljić, Miljenko Svihra, Peter Tiltmann, Nicolas Usai, Gianluca Van Beelen, Jacob Bastiaan Vassilev, Mirella Dimitrova Vernieri, Caterina Villani, Anna |
| description | The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20–40µm and bent to form truly cylindrical half barrels. Among the first critical steps towards the realisation of this detector is to validate the sensor technology through extensive characterisation both in the laboratory and with in-beam measurements. The Digital Pixel Test Structure (DPTS) is one of the prototypes produced in the first sensor submission in this technology and has undergone a systematic measurement campaign whose details are presented in this article.
The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at ＋20°C and a detection efficiency of 99% for a DPTS irradiated with a dose of 10151MeV neq cm-2. Furthermore, spatial, timing and energy resolutions were measured at various settings and irradiation levels. |
| doi_str_mv | 10.1016/j.nima.2023.168589 |
| format | Article |
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The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at ＋20°C and a detection efficiency of 99% for a DPTS irradiated with a dose of 10151MeV neq cm-2. 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The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at ＋20°C and a detection efficiency of 99% for a DPTS irradiated with a dose of 10151MeV neq cm-2. 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Bastiaan ; Vassilev, Mirella Dimitrova ; Vernieri, Caterina ; Villani, Anna</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c441t-fc959ffafb82dd466f8f00c97f88abd71f5e12597944d87c777293444aeb8dbe3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Instrumentation and Detectors</topic><topic>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</topic><topic>Monolithic active pixel sensors</topic><topic>Physics</topic><topic>Solid state detectors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Aglieri Rinella, Gianluca</creatorcontrib><creatorcontrib>Andronic, Anton</creatorcontrib><creatorcontrib>Antonelli, Matias</creatorcontrib><creatorcontrib>Aresti, Mauro</creatorcontrib><creatorcontrib>Baccomi, Roberto</creatorcontrib><creatorcontrib>Becht, Pascal</creatorcontrib><creatorcontrib>Beole, 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Filip</creatorcontrib><creatorcontrib>Lautner, Lukas</creatorcontrib><creatorcontrib>Mager, Magnus</creatorcontrib><creatorcontrib>Marras, Davide</creatorcontrib><creatorcontrib>Martinengo, Paolo</creatorcontrib><creatorcontrib>Masciocchi, Silvia</creatorcontrib><creatorcontrib>Menzel, Marius Wilm</creatorcontrib><creatorcontrib>Munker, Magdalena</creatorcontrib><creatorcontrib>Piro, Francesco</creatorcontrib><creatorcontrib>Rachevski, Alexandre</creatorcontrib><creatorcontrib>Rebane, Karoliina</creatorcontrib><creatorcontrib>Reidt, Felix</creatorcontrib><creatorcontrib>Russo, Roberto</creatorcontrib><creatorcontrib>Sanna, Isabella</creatorcontrib><creatorcontrib>Sarritzu, Valerio</creatorcontrib><creatorcontrib>Senyukov, Serhiy</creatorcontrib><creatorcontrib>Snoeys, Walter</creatorcontrib><creatorcontrib>Sonneveld, Jory</creatorcontrib><creatorcontrib>Šuljić, Miljenko</creatorcontrib><creatorcontrib>Svihra, Peter</creatorcontrib><creatorcontrib>Tiltmann, Nicolas</creatorcontrib><creatorcontrib>Usai, Gianluca</creatorcontrib><creatorcontrib>Van Beelen, Jacob Bastiaan</creatorcontrib><creatorcontrib>Vassilev, Mirella Dimitrova</creatorcontrib><creatorcontrib>Vernieri, Caterina</creatorcontrib><creatorcontrib>Villani, Anna</creatorcontrib><creatorcontrib>SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)</creatorcontrib><collection>ScienceDirect Open Access Titles</collection><collection>Elsevier:ScienceDirect:Open Access</collection><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>OSTI.GOV - Hybrid</collection><collection>OSTI.GOV</collection><jtitle>Nucl.Instrum.Meth.A</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Aglieri Rinella, Gianluca</au><au>Andronic, Anton</au><au>Antonelli, Matias</au><au>Aresti, Mauro</au><au>Baccomi, Roberto</au><au>Becht, Pascal</au><au>Beole, Stefania</au><au>Braach, Justus</au><au>Buckland, Matthew Daniel</au><au>Buschmann, Eric</au><au>Camerini, Paolo</au><au>Carnesecchi, Francesca</au><au>Cecconi, Leonardo</au><au>Charbon, Edoardo</au><au>Contin, Giacomo</au><au>Dannheim, Dominik</au><au>de Melo, Joao</au><au>Deng, Wenjing</au><au>di Mauro, Antonello</au><au>Hasenbichler, Jan</au><au>Hillemanns, Hartmut</au><au>Hong, Geun Hee</au><au>Isakov, Artem</au><au>Junique, Antoine</au><au>Kluge, Alex</au><au>Kotliarov, Artem</au><au>Křížek, Filip</au><au>Lautner, Lukas</au><au>Mager, Magnus</au><au>Marras, Davide</au><au>Martinengo, Paolo</au><au>Masciocchi, Silvia</au><au>Menzel, Marius Wilm</au><au>Munker, Magdalena</au><au>Piro, Francesco</au><au>Rachevski, Alexandre</au><au>Rebane, Karoliina</au><au>Reidt, Felix</au><au>Russo, Roberto</au><au>Sanna, Isabella</au><au>Sarritzu, Valerio</au><au>Senyukov, Serhiy</au><au>Snoeys, Walter</au><au>Sonneveld, Jory</au><au>Šuljić, Miljenko</au><au>Svihra, Peter</au><au>Tiltmann, Nicolas</au><au>Usai, Gianluca</au><au>Van Beelen, Jacob Bastiaan</au><au>Vassilev, Mirella Dimitrova</au><au>Vernieri, Caterina</au><au>Villani, Anna</au><aucorp>SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Digital pixel test structures implemented in a 65 nm CMOS process</atitle><jtitle>Nucl.Instrum.Meth.A</jtitle><date>2023-11-01</date><risdate>2023</risdate><volume>1056</volume><spage>168589</spage><pages>168589-</pages><artnum>168589</artnum><issn>0168-9002</issn><eissn>1872-9576</eissn><abstract>The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20–40µm and bent to form truly cylindrical half barrels. Among the first critical steps towards the realisation of this detector is to validate the sensor technology through extensive characterisation both in the laboratory and with in-beam measurements. The Digital Pixel Test Structure (DPTS) is one of the prototypes produced in the first sensor submission in this technology and has undergone a systematic measurement campaign whose details are presented in this article.
The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at ＋20°C and a detection efficiency of 99% for a DPTS irradiated with a dose of 10151MeV neq cm-2. Furthermore, spatial, timing and energy resolutions were measured at various settings and irradiation levels.</abstract><cop>United States</cop><pub>Elsevier B.V</pub><doi>10.1016/j.nima.2023.168589</doi><orcidid>https://orcid.org/0000-0001-9879-1119</orcidid><orcidid>https://orcid.org/0000-0003-1907-9786</orcidid><orcidid>https://orcid.org/0000-0002-9261-9497</orcidid><orcidid>https://orcid.org/0000-0002-4490-1930</orcidid><orcidid>https://orcid.org/0000-0002-7017-4183</orcidid><orcidid>https://orcid.org/0000-0003-4673-8038</orcidid><orcidid>https://orcid.org/0000-0002-5263-3593</orcidid><orcidid>https://orcid.org/0000-0003-0348-092X</orcidid><orcidid>https://orcid.org/0000-0002-7811-2147</orcidid><orcidid>https://orcid.org/0000-0003-2860-9881</orcidid><orcidid>https://orcid.org/0000-0002-2372-6117</orcidid><orcidid>https://orcid.org/0000-0001-8361-3467</orcidid><orcidid>https://orcid.org/0000-0003-3576-4185</orcidid><orcidid>https://orcid.org/0000-0002-2134-967X</orcidid><orcidid>https://orcid.org/0000-0003-3142-6787</orcidid><orcidid>https://orcid.org/0000-0003-2517-8502</orcidid><orcidid>https://orcid.org/0000-0001-8362-4414</orcidid><orcidid>https://orcid.org/0000-0001-8325-7650</orcidid><orcidid>https://orcid.org/0000-0002-6579-2817</orcidid><orcidid>https://orcid.org/0000-0002-7908-3288</orcidid><orcidid>https://orcid.org/0000-0003-3400-6710</orcidid><orcidid>https://orcid.org/0000-0002-8324-3117</orcidid><orcidid>https://orcid.org/0000-0001-9981-7536</orcidid><orcidid>https://orcid.org/0000-0003-3541-9066</orcidid><orcidid>https://orcid.org/0000-0002-7492-974X</orcidid><orcidid>https://orcid.org/0000000198791119</orcidid><orcidid>https://orcid.org/0000000252633593</orcidid><orcidid>https://orcid.org/0000000331426787</orcidid><orcidid>https://orcid.org/0000000283243117</orcidid><orcidid>https://orcid.org/0000000328609881</orcidid><orcidid>https://orcid.org/0000000334006710</orcidid><orcidid>https://orcid.org/0000000270174183</orcidid><orcidid>https://orcid.org/0000000244901930</orcidid><orcidid>https://orcid.org/0000000183257650</orcidid><orcidid>https://orcid.org/0000000183613467</orcidid><orcidid>https://orcid.org/0000000223726117</orcidid><orcidid>https://orcid.org/0000000279083288</orcidid><orcidid>https://orcid.org/0000000292619497</orcidid><orcidid>https://orcid.org/0000000319079786</orcidid><orcidid>https://orcid.org/0000000325178502</orcidid><orcidid>https://orcid.org/0000000183624414</orcidid><orcidid>https://orcid.org/0000000335419066</orcidid><orcidid>https://orcid.org/0000000278112147</orcidid><orcidid>https://orcid.org/000000030348092X</orcidid><orcidid>https://orcid.org/000000022134967X</orcidid><orcidid>https://orcid.org/0000000346738038</orcidid><orcidid>https://orcid.org/0000000265792817</orcidid><orcidid>https://orcid.org/0000000335764185</orcidid><orcidid>https://orcid.org/0000000199817536</orcidid><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0168-9002 |
| ispartof | Nucl.Instrum.Meth.A, 2023-11, Vol.1056, p.168589, Article 168589 |
| issn | 0168-9002 1872-9576 |
| language | eng |
| recordid | cdi_osti_scitechconnect_2327104 |
| source | Elsevier ScienceDirect Journals |
| subjects | Instrumentation and Detectors INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY Monolithic active pixel sensors Physics Solid state detectors |
| title | Digital pixel test structures implemented in a 65 nm CMOS process |
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