Electrical Conductivity and Barrier Properties of Lithium Niobate Thin Films

The thin-film structures made of LiNbO 3 and obtained via laser ablation and magnetron sputtering are studied with volt-farad and volt-ampere characteristics. A potential barrier on the Si–LiNbO 3 interface was found for both types of the films with the capacitance-voltage characteristics. The curre...

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Veröffentlicht in:	Physics of the solid state 2018-04, Vol.60 (4), p.743-746
Hauptverfasser:	Gudkov, S. I., Baklanova, K. D., Kamenshchikov, M. V., Solnyshkin, A. V., Belov, A. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	ABLATION Analysis CAPACITANCE Capacitance-voltage characteristics CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY Current voltage characteristics DIFFUSION BARRIERS ELECTRIC CONDUCTIVITY Electric properties Electrical conductivity Electrical resistivity Ferroelectricity Laser ablation LASER RADIATION LITHIUM COMPOUNDS Lithium niobate Lithium niobates Magnetron sputtering MAGNETRONS Movies NIOBATES NIOBIUM OXIDES Physics Physics and Astronomy Plasma Potential barriers Solid State Physics SPACE CHARGE SPUTTERING THIN FILMS Volt-ampere characteristics
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