A Study of the Isolation Region of Planar Superconducting YBCO Structures Formed by the Master Mask Method
—The development of a new “master mask” method for the manufacture of planar structures based on a high-temperature YBCO superconductor is considered. The method involves the creation of a mask on the blank substrate and, upon deposition of YBCO, the superconducting elements are formed in preset loc...
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| Veröffentlicht in: | Physics of the solid state 2018-11, Vol.60 (11), p.2139-2144 |
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| container_end_page | 2144 |
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| container_issue | 11 |
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| container_title | Physics of the solid state |
| container_volume | 60 |
| creator | Masterov, D. V. Pavlov, S. A. Parafin, A. E. Skorokhodov, E. V. Yunin, P. A. |
| description | —The development of a new “master mask” method for the manufacture of planar structures based on a high-temperature YBCO superconductor is considered. The method involves the creation of a mask on the blank substrate and, upon deposition of YBCO, the superconducting elements are formed in preset local windows of the mask with isolation regions formed between them. Such growth conditions allow the fabrication of micron-size superconducting elements with excellent electrophysical parameters and a smooth su-rface. The influence of the parameters of the master mask of amorphous cerium oxide on the isolating properties of the resulting isolation regions during the fabrication of planar structures on sapphire and cubic zirconia substrates with epitaxial cerium oxide sublayers has been studied. |
| doi_str_mv | 10.1134/S1063783418110215 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_osti_</sourceid><recordid>TN_cdi_osti_scitechconnect_22770933</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2133469380</sourcerecordid><originalsourceid>FETCH-LOGICAL-c344t-88d9c92e85bb8a9d386cf98ded00a4845149bdc8a787f40d15fbd77e271ef0553</originalsourceid><addsrcrecordid>eNp1UD1PwzAUjBBIlMIPYLPEHPCLncQeS0WhUlERhYEpcuyXNqWNi-0M_fckFKkDYrr3cXc6XRRdA70FYPxuATRjuWAcBABNID2JBkAljTOe0dN-zljc_8-jC-_XlAJAKgfRekQWoTV7YisSVkim3m5UqG1DXnHZQ3d_2ahGObJod-i0bUyrQ90sycf9eN6JXbe2Dj2ZWLdFQ8r9j9Gz8gFdD5_kGcPKmsvorFIbj1e_OIzeJw9v46d4Nn-cjkezWDPOQyyEkVomKNKyFEoaJjJdSWHQUKq44ClwWRotVC7yilMDaVWaPMckB6xomrJhdHPwtT7Uhdd1QL3qcjeoQ5EkeU4lY0fWztmvFn0o1rZ1TResSIAxnkkmaMeCA0s7673Dqti5eqvcvgBa9MUXf4rvNMlB4ztus0R3dP5f9A2C7YOC</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2133469380</pqid></control><display><type>article</type><title>A Study of the Isolation Region of Planar Superconducting YBCO Structures Formed by the Master Mask Method</title><source>SpringerLink Journals</source><creator>Masterov, D. V. ; Pavlov, S. A. ; Parafin, A. E. ; Skorokhodov, E. V. ; Yunin, P. A.</creator><creatorcontrib>Masterov, D. V. ; Pavlov, S. A. ; Parafin, A. E. ; Skorokhodov, E. V. ; Yunin, P. A.</creatorcontrib><description>—The development of a new “master mask” method for the manufacture of planar structures based on a high-temperature YBCO superconductor is considered. The method involves the creation of a mask on the blank substrate and, upon deposition of YBCO, the superconducting elements are formed in preset local windows of the mask with isolation regions formed between them. Such growth conditions allow the fabrication of micron-size superconducting elements with excellent electrophysical parameters and a smooth su-rface. The influence of the parameters of the master mask of amorphous cerium oxide on the isolating properties of the resulting isolation regions during the fabrication of planar structures on sapphire and cubic zirconia substrates with epitaxial cerium oxide sublayers has been studied.</description><identifier>ISSN: 1063-7834</identifier><identifier>EISSN: 1090-6460</identifier><identifier>DOI: 10.1134/S1063783418110215</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>BARIUM OXIDES ; CERIUM OXIDES ; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ; COPPER OXIDES ; DEPOSITION ; EPITAXY ; HIGH-TC SUPERCONDUCTORS ; Parameters ; Physics ; Physics and Astronomy ; Planar structures ; RESPIRATORS ; SAPPHIRE ; Solid State Physics ; SUBSTRATES ; Superconductivity ; YBCO superconductors ; YTTRIUM OXIDES ; Zirconium dioxide ; ZIRCONIUM OXIDES</subject><ispartof>Physics of the solid state, 2018-11, Vol.60 (11), p.2139-2144</ispartof><rights>Pleiades Publishing, Ltd. 2018</rights><rights>Copyright Springer Science & Business Media 2018</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c344t-88d9c92e85bb8a9d386cf98ded00a4845149bdc8a787f40d15fbd77e271ef0553</citedby><cites>FETCH-LOGICAL-c344t-88d9c92e85bb8a9d386cf98ded00a4845149bdc8a787f40d15fbd77e271ef0553</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063783418110215$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063783418110215$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>230,314,780,784,885,27924,27925,41488,42557,51319</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22770933$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Masterov, D. V.</creatorcontrib><creatorcontrib>Pavlov, S. A.</creatorcontrib><creatorcontrib>Parafin, A. E.</creatorcontrib><creatorcontrib>Skorokhodov, E. V.</creatorcontrib><creatorcontrib>Yunin, P. A.</creatorcontrib><title>A Study of the Isolation Region of Planar Superconducting YBCO Structures Formed by the Master Mask Method</title><title>Physics of the solid state</title><addtitle>Phys. Solid State</addtitle><description>—The development of a new “master mask” method for the manufacture of planar structures based on a high-temperature YBCO superconductor is considered. The method involves the creation of a mask on the blank substrate and, upon deposition of YBCO, the superconducting elements are formed in preset local windows of the mask with isolation regions formed between them. Such growth conditions allow the fabrication of micron-size superconducting elements with excellent electrophysical parameters and a smooth su-rface. The influence of the parameters of the master mask of amorphous cerium oxide on the isolating properties of the resulting isolation regions during the fabrication of planar structures on sapphire and cubic zirconia substrates with epitaxial cerium oxide sublayers has been studied.</description><subject>BARIUM OXIDES</subject><subject>CERIUM OXIDES</subject><subject>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</subject><subject>COPPER OXIDES</subject><subject>DEPOSITION</subject><subject>EPITAXY</subject><subject>HIGH-TC SUPERCONDUCTORS</subject><subject>Parameters</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Planar structures</subject><subject>RESPIRATORS</subject><subject>SAPPHIRE</subject><subject>Solid State Physics</subject><subject>SUBSTRATES</subject><subject>Superconductivity</subject><subject>YBCO superconductors</subject><subject>YTTRIUM OXIDES</subject><subject>Zirconium dioxide</subject><subject>ZIRCONIUM OXIDES</subject><issn>1063-7834</issn><issn>1090-6460</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNp1UD1PwzAUjBBIlMIPYLPEHPCLncQeS0WhUlERhYEpcuyXNqWNi-0M_fckFKkDYrr3cXc6XRRdA70FYPxuATRjuWAcBABNID2JBkAljTOe0dN-zljc_8-jC-_XlAJAKgfRekQWoTV7YisSVkim3m5UqG1DXnHZQ3d_2ahGObJod-i0bUyrQ90sycf9eN6JXbe2Dj2ZWLdFQ8r9j9Gz8gFdD5_kGcPKmsvorFIbj1e_OIzeJw9v46d4Nn-cjkezWDPOQyyEkVomKNKyFEoaJjJdSWHQUKq44ClwWRotVC7yilMDaVWaPMckB6xomrJhdHPwtT7Uhdd1QL3qcjeoQ5EkeU4lY0fWztmvFn0o1rZ1TResSIAxnkkmaMeCA0s7673Dqti5eqvcvgBa9MUXf4rvNMlB4ztus0R3dP5f9A2C7YOC</recordid><startdate>20181101</startdate><enddate>20181101</enddate><creator>Masterov, D. V.</creator><creator>Pavlov, S. A.</creator><creator>Parafin, A. E.</creator><creator>Skorokhodov, E. V.</creator><creator>Yunin, P. A.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20181101</creationdate><title>A Study of the Isolation Region of Planar Superconducting YBCO Structures Formed by the Master Mask Method</title><author>Masterov, D. V. ; Pavlov, S. A. ; Parafin, A. E. ; Skorokhodov, E. V. ; Yunin, P. A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c344t-88d9c92e85bb8a9d386cf98ded00a4845149bdc8a787f40d15fbd77e271ef0553</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>BARIUM OXIDES</topic><topic>CERIUM OXIDES</topic><topic>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</topic><topic>COPPER OXIDES</topic><topic>DEPOSITION</topic><topic>EPITAXY</topic><topic>HIGH-TC SUPERCONDUCTORS</topic><topic>Parameters</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Planar structures</topic><topic>RESPIRATORS</topic><topic>SAPPHIRE</topic><topic>Solid State Physics</topic><topic>SUBSTRATES</topic><topic>Superconductivity</topic><topic>YBCO superconductors</topic><topic>YTTRIUM OXIDES</topic><topic>Zirconium dioxide</topic><topic>ZIRCONIUM OXIDES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Masterov, D. V.</creatorcontrib><creatorcontrib>Pavlov, S. A.</creatorcontrib><creatorcontrib>Parafin, A. E.</creatorcontrib><creatorcontrib>Skorokhodov, E. V.</creatorcontrib><creatorcontrib>Yunin, P. A.</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Physics of the solid state</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Masterov, D. V.</au><au>Pavlov, S. A.</au><au>Parafin, A. E.</au><au>Skorokhodov, E. V.</au><au>Yunin, P. A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A Study of the Isolation Region of Planar Superconducting YBCO Structures Formed by the Master Mask Method</atitle><jtitle>Physics of the solid state</jtitle><stitle>Phys. Solid State</stitle><date>2018-11-01</date><risdate>2018</risdate><volume>60</volume><issue>11</issue><spage>2139</spage><epage>2144</epage><pages>2139-2144</pages><issn>1063-7834</issn><eissn>1090-6460</eissn><abstract>—The development of a new “master mask” method for the manufacture of planar structures based on a high-temperature YBCO superconductor is considered. The method involves the creation of a mask on the blank substrate and, upon deposition of YBCO, the superconducting elements are formed in preset local windows of the mask with isolation regions formed between them. Such growth conditions allow the fabrication of micron-size superconducting elements with excellent electrophysical parameters and a smooth su-rface. The influence of the parameters of the master mask of amorphous cerium oxide on the isolating properties of the resulting isolation regions during the fabrication of planar structures on sapphire and cubic zirconia substrates with epitaxial cerium oxide sublayers has been studied.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1063783418110215</doi><tpages>6</tpages></addata></record> |
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| identifier | ISSN: 1063-7834 |
| ispartof | Physics of the solid state, 2018-11, Vol.60 (11), p.2139-2144 |
| issn | 1063-7834 1090-6460 |
| language | eng |
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| source | SpringerLink Journals |
| subjects | BARIUM OXIDES CERIUM OXIDES CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY COPPER OXIDES DEPOSITION EPITAXY HIGH-TC SUPERCONDUCTORS Parameters Physics Physics and Astronomy Planar structures RESPIRATORS SAPPHIRE Solid State Physics SUBSTRATES Superconductivity YBCO superconductors YTTRIUM OXIDES Zirconium dioxide ZIRCONIUM OXIDES |
| title | A Study of the Isolation Region of Planar Superconducting YBCO Structures Formed by the Master Mask Method |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T13%3A19%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_osti_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20Study%20of%20the%20Isolation%20Region%20of%20Planar%20Superconducting%20YBCO%20Structures%20Formed%20by%20the%20Master%20Mask%20Method&rft.jtitle=Physics%20of%20the%20solid%20state&rft.au=Masterov,%20D.%20V.&rft.date=2018-11-01&rft.volume=60&rft.issue=11&rft.spage=2139&rft.epage=2144&rft.pages=2139-2144&rft.issn=1063-7834&rft.eissn=1090-6460&rft_id=info:doi/10.1134/S1063783418110215&rft_dat=%3Cproquest_osti_%3E2133469380%3C/proquest_osti_%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2133469380&rft_id=info:pmid/&rfr_iscdi=true |