Optical properties of p–i–n structures based on amorphous hydrogenated silicon with silicon nanocrystals formed via nanosecond laser annealing

Silicon nanocrystals are formed in the i layers of p–i–n structures based on a -Si:H using pulsed laser annealing. An excimer XeCl laser with a wavelength of 308 nm and a pulse duration of 15 ns is used. The laser fluence is varied from 100 (below the melting threshold) to 250 mJ/cm 2 (above the thr...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2016-07, Vol.50 (7), p.935-940
Hauptverfasser: Krivyakin, G. K., Volodin, V. A., Kochubei, S. A., Kamaev, G. N., Purkrt, A., Remes, Z., Fajgar, R., Stuchliková, T. H., Stuchlik, J.
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Sprache:eng
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