Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope

In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image proces...

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Veröffentlicht in:AIP advances 2016-04, Vol.6 (4), p.045007-045007-4
Hauptverfasser: Santamaria, L., Garcia-Ortiz, C. E., Siller, H. R., Cortes, R., Coello, V.
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container_issue 4
container_start_page 045007
container_title AIP advances
container_volume 6
creator Santamaria, L.
Garcia-Ortiz, C. E.
Siller, H. R.
Cortes, R.
Coello, V.
description In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image processing and numerical analysis. The technique can also be strategically combined with the characterization of piezoelectric actuators and stability evaluation of the optical system. It also opens the possibility for the development of an automatic approximation control system valid for probe-sample distances from 5 to 500 μm.
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subjects ACCURACY
APPROXIMATIONS
Automatic control
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
CONTROL SYSTEMS
Digital imaging
DISTANCE
IMAGE PROCESSING
INTERFEROMETERS
Microscopes
MIRRORS
Near field optical microscopes
NUMERICAL ANALYSIS
OPTICAL MICROSCOPES
OPTICAL SYSTEMS
Piezoelectric actuators
PIEZOELECTRICITY
Separation
STABILITY
Stability analysis
title Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
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