High quality factor indium oxide mechanical microresonators
The mechanical resonance behavior of as-grown In2O3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, s...
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Veröffentlicht in: | Applied physics letters 2015-11, Vol.107 (19) |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The mechanical resonance behavior of as-grown In2O3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than 105 and minimum detectable forces of the order of 10−16 N/Hz1/2 demonstrate their potential as mechanical microresonators for real applications. Measurements at low-vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4935708 |