High quality factor indium oxide mechanical microresonators

The mechanical resonance behavior of as-grown In2O3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, s...

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Veröffentlicht in:Applied physics letters 2015-11, Vol.107 (19)
Hauptverfasser: Bartolomé, Javier, Cremades, Ana, Piqueras, Javier
Format: Artikel
Sprache:eng
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Zusammenfassung:The mechanical resonance behavior of as-grown In2O3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than 105 and minimum detectable forces of the order of 10−16 N/Hz1/2 demonstrate their potential as mechanical microresonators for real applications. Measurements at low-vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4935708