Temperature dependences of the contact resistivity in ohmic contacts to n+-InN

The temperature dependences of the contact resistivity (ρ c ) of ohmic contacts based on the Au-Ti-Pd-InN system are measured at an InN doping level of 2 × 10 18 cm −3 in the temperature range of 4.2–300 K. At temperatures T > 150 K, linearly increasing dependences ρ c ( T ) are obtained. The dep...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2015-04, Vol.49 (4), p.461-471
Hauptverfasser: Sachenko, A. V., Belyaev, A. E., Boltovets, N. S., Brunkov, P. N., Jmerik, V. N., Ivanov, S. V., Kapitanchuk, L. M., Konakova, R. V., Klad’ko, V. P., Romanets, P. N., Saja, P. O., Safryuk, N. V., Sheremet, V. N.
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container_end_page 471
container_issue 4
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container_title Semiconductors (Woodbury, N.Y.)
container_volume 49
creator Sachenko, A. V.
Belyaev, A. E.
Boltovets, N. S.
Brunkov, P. N.
Jmerik, V. N.
Ivanov, S. V.
Kapitanchuk, L. M.
Konakova, R. V.
Klad’ko, V. P.
Romanets, P. N.
Saja, P. O.
Safryuk, N. V.
Sheremet, V. N.
description The temperature dependences of the contact resistivity (ρ c ) of ohmic contacts based on the Au-Ti-Pd-InN system are measured at an InN doping level of 2 × 10 18 cm −3 in the temperature range of 4.2–300 K. At temperatures T > 150 K, linearly increasing dependences ρ c ( T ) are obtained. The dependences are explained within the mechanism of thermionic current flow through metal shunts associated with dislocations. Good agreement between theoretical and experimental dependences is achieved assuming that the flowing current is limited by the total resistance of the metal shunts, and the density of conductive dislocations is ∼5 × 10 9 cm −2 . Using the X-ray diffraction method, the density of screw and edge dislocations in the structure under study is measured: their total density exceeds 10 10 cm −2 .
doi_str_mv 10.1134/S1063782615040193
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subjects DENSITY
EDGE DISLOCATIONS
ELECTRIC CONDUCTIVITY
FASTENERS
GOLD
INDIUM NITRIDES
Low-Dimensional Systems
Magnetic Materials
Magnetism
MATERIALS SCIENCE
NITROGEN IONS
PALLADIUM
Physics
Physics and Astronomy
Quantum Phenomena
SCREW DISLOCATIONS
Semiconductor Structures
TEMPERATURE DEPENDENCE
TITANIUM
X-RAY DIFFRACTION
title Temperature dependences of the contact resistivity in ohmic contacts to n+-InN
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