Temperature dependences of the photoluminescence intensities of centers in silicon implanted with erbium and oxygen ions

Low-temperature photoluminescence in n -Cz-Si after the implantation of erbium ions at an elevated temperature and subsequent implantation of oxygen ions at room temperature is studied. So-called X and W centers formed from self-interstitial silicon atoms, H and P centers containing oxygen atoms, an...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2015-12, Vol.49 (12), p.1651-1654
Hauptverfasser: Sobolev, N. A., Shtel’makh, K. F., Kalyadin, A. E., Shek, E. I.
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container_end_page 1654
container_issue 12
container_start_page 1651
container_title Semiconductors (Woodbury, N.Y.)
container_volume 49
creator Sobolev, N. A.
Shtel’makh, K. F.
Kalyadin, A. E.
Shek, E. I.
description Low-temperature photoluminescence in n -Cz-Si after the implantation of erbium ions at an elevated temperature and subsequent implantation of oxygen ions at room temperature is studied. So-called X and W centers formed from self-interstitial silicon atoms, H and P centers containing oxygen atoms, and Er centers containing Er 3+ ions are observed in the photoluminescence spectra. The energies of enhancing and quenching of photoluminescence for these centers are determined. These energies are determined for the first time for X and H centers. In the case of P and Er centers, the values of the energies practically coincide with previously published data. For W centers, the energies of the enhancing and quenching of photoluminescence depend on the conditions of the formation of these centers.
doi_str_mv 10.1134/S1063782615120209
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subjects EMISSION SPECTRA
ERBIUM
ERBIUM IONS
H CENTERS
Interaction with Radiation
ION IMPLANTATION
Magnetic Materials
Magnetism
MATERIALS SCIENCE
N-TYPE CONDUCTORS
OXYGEN
OXYGEN IONS
PHOTOLUMINESCENCE
Physics
Physics and Astronomy
QUENCHING
SILICON
Spectroscopy
TEMPERATURE DEPENDENCE
title Temperature dependences of the photoluminescence intensities of centers in silicon implanted with erbium and oxygen ions
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