Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas
The radial profiles of the electron density at the bottom wall were measured from the center to the edge at argon 3 mTorr with an RF power of 200 W. Since the Boltzmann relation in terms of the fluid picture only describes the behavior of the confined particles, the escaping electrons, which are not...
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| Veröffentlicht in: | Applied physics letters 2015-02, Vol.106 (7) |
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| container_title | Applied physics letters |
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| creator | Kim, Young-Cheol Kim, June Young Lee, Hyo-Chang Kim, Yu-Sin Kim, Jin-Yong Cho, Sung-Won Chung, Chin-Wook |
| description | The radial profiles of the electron density at the bottom wall were measured from the center to the edge at argon 3 mTorr with an RF power of 200 W. Since the Boltzmann relation in terms of the fluid picture only describes the behavior of the confined particles, the escaping electrons, which are not confined in plasmas, were not expected to follow the Boltzmann relation. However, unexpected results were observed. The spatial profiles of the density of escaping electrons and the floating potential were well described by the Boltzmann relation with the electron temperature. Moreover, it was concluded that the behavior of the escaping electrons is also described by the generalized Boltzmann relation in terms of the kinetic model. |
| doi_str_mv | 10.1063/1.4906575 |
| format | Article |
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Since the Boltzmann relation in terms of the fluid picture only describes the behavior of the confined particles, the escaping electrons, which are not confined in plasmas, were not expected to follow the Boltzmann relation. However, unexpected results were observed. The spatial profiles of the density of escaping electrons and the floating potential were well described by the Boltzmann relation with the electron temperature. Moreover, it was concluded that the behavior of the escaping electrons is also described by the generalized Boltzmann relation in terms of the kinetic model.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.4906575</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>70 PLASMA PHYSICS AND FUSION TECHNOLOGY ; Applied physics ; ARGON ; BOLTZMANN EQUATION ; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ; Coupled walls ; ELECTRON DENSITY ; Electron energy ; ELECTRON TEMPERATURE ; ELECTRONS ; Inductively coupled plasma ; PARTICLES ; PLASMA ; PLASMA CONFINEMENT ; POTENTIALS</subject><ispartof>Applied physics letters, 2015-02, Vol.106 (7)</ispartof><rights>2015 AIP Publishing LLC.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c285t-19d29ca975a5b7ece037cb5f72d208a5cfa3ee3dd384038a9a4ca1b8ccfe9f273</citedby><cites>FETCH-LOGICAL-c285t-19d29ca975a5b7ece037cb5f72d208a5cfa3ee3dd384038a9a4ca1b8ccfe9f273</cites><orcidid>0000-0001-6529-3607 ; 0000-0001-7438-4463</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,777,781,882,27905,27906</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22412672$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Kim, Young-Cheol</creatorcontrib><creatorcontrib>Kim, June Young</creatorcontrib><creatorcontrib>Lee, Hyo-Chang</creatorcontrib><creatorcontrib>Kim, Yu-Sin</creatorcontrib><creatorcontrib>Kim, Jin-Yong</creatorcontrib><creatorcontrib>Cho, Sung-Won</creatorcontrib><creatorcontrib>Chung, Chin-Wook</creatorcontrib><title>Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas</title><title>Applied physics letters</title><description>The radial profiles of the electron density at the bottom wall were measured from the center to the edge at argon 3 mTorr with an RF power of 200 W. Since the Boltzmann relation in terms of the fluid picture only describes the behavior of the confined particles, the escaping electrons, which are not confined in plasmas, were not expected to follow the Boltzmann relation. However, unexpected results were observed. The spatial profiles of the density of escaping electrons and the floating potential were well described by the Boltzmann relation with the electron temperature. Moreover, it was concluded that the behavior of the escaping electrons is also described by the generalized Boltzmann relation in terms of the kinetic model.</description><subject>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</subject><subject>Applied physics</subject><subject>ARGON</subject><subject>BOLTZMANN EQUATION</subject><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><subject>Coupled walls</subject><subject>ELECTRON DENSITY</subject><subject>Electron energy</subject><subject>ELECTRON TEMPERATURE</subject><subject>ELECTRONS</subject><subject>Inductively coupled plasma</subject><subject>PARTICLES</subject><subject>PLASMA</subject><subject>PLASMA CONFINEMENT</subject><subject>POTENTIALS</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNpFkE1LAzEQhoMoWKsH_0HAk4et-dhsdo9a6gcIXvRqmGYndEu6WTfZav31rrYgDMwM78MwPIRccjbjrJA3fJZXrFBaHZEJZ1pnkvPymEwYYzIrKsVPyVmM63FVQsoJeV98ddg3G2wTeLodR9dYSE1oaXA0rZDeBZ--N9C2tEe_TyD9JZ_gPW3aserBpmaLfkdtGDqPNe08xA3Ec3LiwEe8OPQpebtfvM4fs-eXh6f57XNmRalSxqtaVBYqrUAtNVpkUtulclrUgpWgrAOJKOtaljmTJVSQW-DL0lqHlRNaTsnV_m6IqTHRNgntyoa2RZuMEDkXhRb_VNeHjwFjMusw9O34mBFcjOJyWfKRut5Ttg8x9uhMNwqCfmc4M7-SDTcHyfIHzAFvbA</recordid><startdate>20150216</startdate><enddate>20150216</enddate><creator>Kim, Young-Cheol</creator><creator>Kim, June Young</creator><creator>Lee, Hyo-Chang</creator><creator>Kim, Yu-Sin</creator><creator>Kim, Jin-Yong</creator><creator>Cho, Sung-Won</creator><creator>Chung, Chin-Wook</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>OTOTI</scope><orcidid>https://orcid.org/0000-0001-6529-3607</orcidid><orcidid>https://orcid.org/0000-0001-7438-4463</orcidid></search><sort><creationdate>20150216</creationdate><title>Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas</title><author>Kim, Young-Cheol ; Kim, June Young ; Lee, Hyo-Chang ; Kim, Yu-Sin ; Kim, Jin-Yong ; Cho, Sung-Won ; Chung, Chin-Wook</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c285t-19d29ca975a5b7ece037cb5f72d208a5cfa3ee3dd384038a9a4ca1b8ccfe9f273</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</topic><topic>Applied physics</topic><topic>ARGON</topic><topic>BOLTZMANN EQUATION</topic><topic>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</topic><topic>Coupled walls</topic><topic>ELECTRON DENSITY</topic><topic>Electron energy</topic><topic>ELECTRON TEMPERATURE</topic><topic>ELECTRONS</topic><topic>Inductively coupled plasma</topic><topic>PARTICLES</topic><topic>PLASMA</topic><topic>PLASMA CONFINEMENT</topic><topic>POTENTIALS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kim, Young-Cheol</creatorcontrib><creatorcontrib>Kim, June Young</creatorcontrib><creatorcontrib>Lee, Hyo-Chang</creatorcontrib><creatorcontrib>Kim, Yu-Sin</creatorcontrib><creatorcontrib>Kim, Jin-Yong</creatorcontrib><creatorcontrib>Cho, Sung-Won</creatorcontrib><creatorcontrib>Chung, Chin-Wook</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kim, Young-Cheol</au><au>Kim, June Young</au><au>Lee, Hyo-Chang</au><au>Kim, Yu-Sin</au><au>Kim, Jin-Yong</au><au>Cho, Sung-Won</au><au>Chung, Chin-Wook</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas</atitle><jtitle>Applied physics letters</jtitle><date>2015-02-16</date><risdate>2015</risdate><volume>106</volume><issue>7</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>The radial profiles of the electron density at the bottom wall were measured from the center to the edge at argon 3 mTorr with an RF power of 200 W. Since the Boltzmann relation in terms of the fluid picture only describes the behavior of the confined particles, the escaping electrons, which are not confined in plasmas, were not expected to follow the Boltzmann relation. However, unexpected results were observed. The spatial profiles of the density of escaping electrons and the floating potential were well described by the Boltzmann relation with the electron temperature. Moreover, it was concluded that the behavior of the escaping electrons is also described by the generalized Boltzmann relation in terms of the kinetic model.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.4906575</doi><orcidid>https://orcid.org/0000-0001-6529-3607</orcidid><orcidid>https://orcid.org/0000-0001-7438-4463</orcidid></addata></record> |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | 70 PLASMA PHYSICS AND FUSION TECHNOLOGY Applied physics ARGON BOLTZMANN EQUATION CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS Coupled walls ELECTRON DENSITY Electron energy ELECTRON TEMPERATURE ELECTRONS Inductively coupled plasma PARTICLES PLASMA PLASMA CONFINEMENT POTENTIALS |
| title | Experimental verification of the Boltzmann relation at the wall in inductively coupled plasmas |
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