Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion
This paper presents a design and control system for an XY stage driven by an ultrasonic linear motor. In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These...
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| Veröffentlicht in: | Review of scientific instruments 2015-01, Vol.86 (1), p.015111-015111 |
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| creator | Lee, Dong-Jin Lee, Sun-Kyu |
| description | This paper presents a design and control system for an XY stage driven by an ultrasonic linear motor. In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These two modes were matched through the preload adjustment and precisely tuned by the frequency matching method based on the impedance matching method with consideration of the different moving weights. The XY stage was evaluated in terms of position and circular motion. To achieve both fine and stable motion, the controller consisted of a nominal characteristics trajectory following (NCTF) control for continuous motion, dead zone compensation, and a switching controller based on the different NCTFs for the macro- and micro-dynamics regimes. The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy. |
| doi_str_mv | 10.1063/1.4905897 |
| format | Article |
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The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.4905897</identifier><identifier>PMID: 25638126</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>ACCURACY ; Bolts ; CONTROL SYSTEMS ; Control systems design ; DESIGN ; Electric motors ; Equipment Design ; Hot Temperature ; IMPEDANCE ; Impedance matching ; INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY ; Motion ; MOTORS ; POSITIONING ; RESONANCE ; Scientific apparatus & instruments ; Trajectory control ; Ultrasonics - instrumentation ; Ultrasonics - methods ; Vibration</subject><ispartof>Review of scientific instruments, 2015-01, Vol.86 (1), p.015111-015111</ispartof><rights>2015 Author(s). 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In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These two modes were matched through the preload adjustment and precisely tuned by the frequency matching method based on the impedance matching method with consideration of the different moving weights. The XY stage was evaluated in terms of position and circular motion. To achieve both fine and stable motion, the controller consisted of a nominal characteristics trajectory following (NCTF) control for continuous motion, dead zone compensation, and a switching controller based on the different NCTFs for the macro- and micro-dynamics regimes. The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy.</description><subject>ACCURACY</subject><subject>Bolts</subject><subject>CONTROL SYSTEMS</subject><subject>Control systems design</subject><subject>DESIGN</subject><subject>Electric motors</subject><subject>Equipment Design</subject><subject>Hot Temperature</subject><subject>IMPEDANCE</subject><subject>Impedance matching</subject><subject>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</subject><subject>Motion</subject><subject>MOTORS</subject><subject>POSITIONING</subject><subject>RESONANCE</subject><subject>Scientific apparatus & instruments</subject><subject>Trajectory control</subject><subject>Ultrasonics - instrumentation</subject><subject>Ultrasonics - methods</subject><subject>Vibration</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><sourceid>EIF</sourceid><recordid>eNpFkUuLFDEURoMoTju68A9IwI0uasyrUqmlDL6gwY0Dugp53OrJUJWUSUrof2-absdACNwczr2XD6HXlNxQIvkHeiNG0qtxeIJ2lKixGyTjT9GOEC46OQh1hV6U8kDa6Sl9jq5YL7miTO5QuptrNmsGF0pIEf_8hUs1B8BbCfGADb4_2hw8tmmunZvNsoLHexMP8CfErh7XRp4MJcXg8BwimIyXVFPGU7suxRrilrZyKrYGL9GzycwFXl3ea3T3-dOP26_d_vuXb7cf953jg6wdTMYrENSPdvKcGjpyYiz0njLbW25h8qJXSgrR_hQVIMUwSD8qy6kHIfg1env2plKDLi5UcPdtmgiuasb4yDjvG_XuTK05_d6gVL2E4mCeTYQ2s6ayZ4IPgpL_wkf0IW05th00o0yMgozsJHx_plxOpWSY9JrDYvJRU6JPWWmqL1k19s3FuNkF_CP5Lxz-F1vNjoY</recordid><startdate>20150101</startdate><enddate>20150101</enddate><creator>Lee, Dong-Jin</creator><creator>Lee, Sun-Kyu</creator><general>American Institute of Physics</general><scope>CGR</scope><scope>CUY</scope><scope>CVF</scope><scope>ECM</scope><scope>EIF</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7X8</scope><scope>OTOTI</scope></search><sort><creationdate>20150101</creationdate><title>Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion</title><author>Lee, Dong-Jin ; Lee, Sun-Kyu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c376t-efad8e41d9bfd31a1930abe5d12b5b3befd45886441a1814e64776d98b31de443</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>ACCURACY</topic><topic>Bolts</topic><topic>CONTROL SYSTEMS</topic><topic>Control systems design</topic><topic>DESIGN</topic><topic>Electric motors</topic><topic>Equipment Design</topic><topic>Hot Temperature</topic><topic>IMPEDANCE</topic><topic>Impedance matching</topic><topic>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</topic><topic>Motion</topic><topic>MOTORS</topic><topic>POSITIONING</topic><topic>RESONANCE</topic><topic>Scientific apparatus & instruments</topic><topic>Trajectory control</topic><topic>Ultrasonics - instrumentation</topic><topic>Ultrasonics - methods</topic><topic>Vibration</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lee, Dong-Jin</creatorcontrib><creatorcontrib>Lee, Sun-Kyu</creatorcontrib><collection>Medline</collection><collection>MEDLINE</collection><collection>MEDLINE (Ovid)</collection><collection>MEDLINE</collection><collection>MEDLINE</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><collection>OSTI.GOV</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lee, Dong-Jin</au><au>Lee, Sun-Kyu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion</atitle><jtitle>Review of scientific instruments</jtitle><addtitle>Rev Sci Instrum</addtitle><date>2015-01-01</date><risdate>2015</risdate><volume>86</volume><issue>1</issue><spage>015111</spage><epage>015111</epage><pages>015111-015111</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><abstract>This paper presents a design and control system for an XY stage driven by an ultrasonic linear motor. In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These two modes were matched through the preload adjustment and precisely tuned by the frequency matching method based on the impedance matching method with consideration of the different moving weights. The XY stage was evaluated in terms of position and circular motion. To achieve both fine and stable motion, the controller consisted of a nominal characteristics trajectory following (NCTF) control for continuous motion, dead zone compensation, and a switching controller based on the different NCTFs for the macro- and micro-dynamics regimes. The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><pmid>25638126</pmid><doi>10.1063/1.4905897</doi><tpages>1</tpages><oa>free_for_read</oa></addata></record> |
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| ispartof | Review of scientific instruments, 2015-01, Vol.86 (1), p.015111-015111 |
| issn | 0034-6748 1089-7623 |
| language | eng |
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| source | MEDLINE; AIP Journals Complete; Alma/SFX Local Collection |
| subjects | ACCURACY Bolts CONTROL SYSTEMS Control systems design DESIGN Electric motors Equipment Design Hot Temperature IMPEDANCE Impedance matching INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY Motion MOTORS POSITIONING RESONANCE Scientific apparatus & instruments Trajectory control Ultrasonics - instrumentation Ultrasonics - methods Vibration |
| title | Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion |
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