Characterization of Fe–Cr alloy metallic interconnects coated with LSMO using the aerosol deposition process
•Lanthanum strontium manganite (LSMO) as the protective layer for metallic interconnects was successfully prepared by aerosol deposition method (AD).•The microstructure, electrical resistance and composition for LSMO-coated Fe–Cr alloys undergoing high temperature, long-hour oxidation were investiga...
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Veröffentlicht in: | Materials research bulletin 2014-03, Vol.51, p.63-68 |
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description | •Lanthanum strontium manganite (LSMO) as the protective layer for metallic interconnects was successfully prepared by aerosol deposition method (AD).•The microstructure, electrical resistance and composition for LSMO-coated Fe–Cr alloys undergoing high temperature, long-hour oxidation were investigated.•The denser protective layer prepared by AD might effectively prohibit the growth of oxidized scale after long time running at 800°C in air.
A Fe–Cr alloy, used for metallic interconnects, was coated with a protective layer of lanthanum strontium manganite (LSMO) using the aerosol deposition method (AD). The effects of the LSMO protective layer, which was coated on the Fe–Cr interconnects using AD, on the area specific resistance (ASR) during high temperature oxidation and the Cr evaporation behaviors were systematically investigated in this paper. The microstructures, morphologies, and compositions of the oxidized scales that appeared on the LSMO-coated Fe–Cr alloy after annealing at 800°C for 750h in air were examined using SEM equipped with EDS. The EPMA mapping of the LSMO-coated Fe–Cr interconnects undergoing long term, high-temperature oxidation was used to explain the formation layers of the oxidized scale, which consists of (Mn,Cr)3O4 and Cr2O3 layers. Moreover, the experimental results revealed that the AD process is a potential method for preparing denser protective layers with highly desirable electrical properties for metallic interconnects. |
doi_str_mv | 10.1016/j.materresbull.2013.11.058 |
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A Fe–Cr alloy, used for metallic interconnects, was coated with a protective layer of lanthanum strontium manganite (LSMO) using the aerosol deposition method (AD). The effects of the LSMO protective layer, which was coated on the Fe–Cr interconnects using AD, on the area specific resistance (ASR) during high temperature oxidation and the Cr evaporation behaviors were systematically investigated in this paper. The microstructures, morphologies, and compositions of the oxidized scales that appeared on the LSMO-coated Fe–Cr alloy after annealing at 800°C for 750h in air were examined using SEM equipped with EDS. The EPMA mapping of the LSMO-coated Fe–Cr interconnects undergoing long term, high-temperature oxidation was used to explain the formation layers of the oxidized scale, which consists of (Mn,Cr)3O4 and Cr2O3 layers. Moreover, the experimental results revealed that the AD process is a potential method for preparing denser protective layers with highly desirable electrical properties for metallic interconnects.</description><identifier>ISSN: 0025-5408</identifier><identifier>EISSN: 1873-4227</identifier><identifier>DOI: 10.1016/j.materresbull.2013.11.058</identifier><language>eng</language><publisher>United States: Elsevier Ltd</publisher><subject>A. Interfaces ; AEROSOLS ; ALLOYS ; C. Electron microscopy ; CHROMATES ; CHROMIUM OXIDES ; D. Diffusion ; D. Electrical properties ; DEPOSITION ; ELECTRIC CONDUCTIVITY ; ELECTRON MICROPROBE ANALYSIS ; EVAPORATION ; LANTHANUM ; MATERIALS SCIENCE ; MICROSTRUCTURE ; OXIDATION ; SCANNING ELECTRON MICROSCOPY ; STRONTIUM</subject><ispartof>Materials research bulletin, 2014-03, Vol.51, p.63-68</ispartof><rights>2013 Elsevier Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c352t-dc63605c01c11063c0dc06ae59fa3212cb9afc3004c68008603ed2905d90a9d23</citedby><cites>FETCH-LOGICAL-c352t-dc63605c01c11063c0dc06ae59fa3212cb9afc3004c68008603ed2905d90a9d23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0025540813009483$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>230,314,776,780,881,3537,27901,27902,65306</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22348583$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Huang, Jian-Jia</creatorcontrib><creatorcontrib>Fu, Yen-Pei</creatorcontrib><creatorcontrib>Wang, Jian-Yih</creatorcontrib><creatorcontrib>Cheng, Yung-Neng</creatorcontrib><creatorcontrib>Lee, Shyong</creatorcontrib><creatorcontrib>Hsu, Jin-Cherng</creatorcontrib><title>Characterization of Fe–Cr alloy metallic interconnects coated with LSMO using the aerosol deposition process</title><title>Materials research bulletin</title><description>•Lanthanum strontium manganite (LSMO) as the protective layer for metallic interconnects was successfully prepared by aerosol deposition method (AD).•The microstructure, electrical resistance and composition for LSMO-coated Fe–Cr alloys undergoing high temperature, long-hour oxidation were investigated.•The denser protective layer prepared by AD might effectively prohibit the growth of oxidized scale after long time running at 800°C in air.
A Fe–Cr alloy, used for metallic interconnects, was coated with a protective layer of lanthanum strontium manganite (LSMO) using the aerosol deposition method (AD). The effects of the LSMO protective layer, which was coated on the Fe–Cr interconnects using AD, on the area specific resistance (ASR) during high temperature oxidation and the Cr evaporation behaviors were systematically investigated in this paper. The microstructures, morphologies, and compositions of the oxidized scales that appeared on the LSMO-coated Fe–Cr alloy after annealing at 800°C for 750h in air were examined using SEM equipped with EDS. The EPMA mapping of the LSMO-coated Fe–Cr interconnects undergoing long term, high-temperature oxidation was used to explain the formation layers of the oxidized scale, which consists of (Mn,Cr)3O4 and Cr2O3 layers. Moreover, the experimental results revealed that the AD process is a potential method for preparing denser protective layers with highly desirable electrical properties for metallic interconnects.</description><subject>A. Interfaces</subject><subject>AEROSOLS</subject><subject>ALLOYS</subject><subject>C. Electron microscopy</subject><subject>CHROMATES</subject><subject>CHROMIUM OXIDES</subject><subject>D. Diffusion</subject><subject>D. Electrical properties</subject><subject>DEPOSITION</subject><subject>ELECTRIC CONDUCTIVITY</subject><subject>ELECTRON MICROPROBE ANALYSIS</subject><subject>EVAPORATION</subject><subject>LANTHANUM</subject><subject>MATERIALS SCIENCE</subject><subject>MICROSTRUCTURE</subject><subject>OXIDATION</subject><subject>SCANNING ELECTRON MICROSCOPY</subject><subject>STRONTIUM</subject><issn>0025-5408</issn><issn>1873-4227</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNqNUL1u2zAQJoIWqOv2HYhmlnIkLVnqFjh1WsCFhyQzQR9PMQ1ZNEg6hTPlHfqGfZLQsYeMne6G75-xbwJKAaK-2pRbkygEiqt935cShCqFKKFqLthINFNVTKScfmAjAFkV1QSaT-xzjBsAmDTT6YgNs7UJBrOGezbJ-YH7js_p38vfWeCm7_2BbynlxyF3Q4ahHwbCFDn67Gz5H5fWfHH3e8n30Q2PPK2JGwo--p5b2vno3lR3wSPF-IV97Ewf6ev5jtnD_Mf97GexWN7-ml0vClSVTIXFWtVQIQgUAmqFYBFqQ1XbGSWFxFVrOlS5BNYNQFODIitbqGwLprVSjdnlSdfH5HRElwjX5-haSjVpqkZl1PcTCnPeGKjTu-C2Jhy0AH3cV2_0-331cV8thM77ZvLNiUy5x5OjcLShAcm6cHSx3v2PzCvkJ418</recordid><startdate>201403</startdate><enddate>201403</enddate><creator>Huang, Jian-Jia</creator><creator>Fu, Yen-Pei</creator><creator>Wang, Jian-Yih</creator><creator>Cheng, Yung-Neng</creator><creator>Lee, Shyong</creator><creator>Hsu, Jin-Cherng</creator><general>Elsevier Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>201403</creationdate><title>Characterization of Fe–Cr alloy metallic interconnects coated with LSMO using the aerosol deposition process</title><author>Huang, Jian-Jia ; Fu, Yen-Pei ; Wang, Jian-Yih ; Cheng, Yung-Neng ; Lee, Shyong ; Hsu, Jin-Cherng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c352t-dc63605c01c11063c0dc06ae59fa3212cb9afc3004c68008603ed2905d90a9d23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>A. Interfaces</topic><topic>AEROSOLS</topic><topic>ALLOYS</topic><topic>C. Electron microscopy</topic><topic>CHROMATES</topic><topic>CHROMIUM OXIDES</topic><topic>D. Diffusion</topic><topic>D. Electrical properties</topic><topic>DEPOSITION</topic><topic>ELECTRIC CONDUCTIVITY</topic><topic>ELECTRON MICROPROBE ANALYSIS</topic><topic>EVAPORATION</topic><topic>LANTHANUM</topic><topic>MATERIALS SCIENCE</topic><topic>MICROSTRUCTURE</topic><topic>OXIDATION</topic><topic>SCANNING ELECTRON MICROSCOPY</topic><topic>STRONTIUM</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Huang, Jian-Jia</creatorcontrib><creatorcontrib>Fu, Yen-Pei</creatorcontrib><creatorcontrib>Wang, Jian-Yih</creatorcontrib><creatorcontrib>Cheng, Yung-Neng</creatorcontrib><creatorcontrib>Lee, Shyong</creatorcontrib><creatorcontrib>Hsu, Jin-Cherng</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Materials research bulletin</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Huang, Jian-Jia</au><au>Fu, Yen-Pei</au><au>Wang, Jian-Yih</au><au>Cheng, Yung-Neng</au><au>Lee, Shyong</au><au>Hsu, Jin-Cherng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Characterization of Fe–Cr alloy metallic interconnects coated with LSMO using the aerosol deposition process</atitle><jtitle>Materials research bulletin</jtitle><date>2014-03</date><risdate>2014</risdate><volume>51</volume><spage>63</spage><epage>68</epage><pages>63-68</pages><issn>0025-5408</issn><eissn>1873-4227</eissn><abstract>•Lanthanum strontium manganite (LSMO) as the protective layer for metallic interconnects was successfully prepared by aerosol deposition method (AD).•The microstructure, electrical resistance and composition for LSMO-coated Fe–Cr alloys undergoing high temperature, long-hour oxidation were investigated.•The denser protective layer prepared by AD might effectively prohibit the growth of oxidized scale after long time running at 800°C in air.
A Fe–Cr alloy, used for metallic interconnects, was coated with a protective layer of lanthanum strontium manganite (LSMO) using the aerosol deposition method (AD). The effects of the LSMO protective layer, which was coated on the Fe–Cr interconnects using AD, on the area specific resistance (ASR) during high temperature oxidation and the Cr evaporation behaviors were systematically investigated in this paper. The microstructures, morphologies, and compositions of the oxidized scales that appeared on the LSMO-coated Fe–Cr alloy after annealing at 800°C for 750h in air were examined using SEM equipped with EDS. The EPMA mapping of the LSMO-coated Fe–Cr interconnects undergoing long term, high-temperature oxidation was used to explain the formation layers of the oxidized scale, which consists of (Mn,Cr)3O4 and Cr2O3 layers. Moreover, the experimental results revealed that the AD process is a potential method for preparing denser protective layers with highly desirable electrical properties for metallic interconnects.</abstract><cop>United States</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.materresbull.2013.11.058</doi><tpages>6</tpages></addata></record> |
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subjects | A. Interfaces AEROSOLS ALLOYS C. Electron microscopy CHROMATES CHROMIUM OXIDES D. Diffusion D. Electrical properties DEPOSITION ELECTRIC CONDUCTIVITY ELECTRON MICROPROBE ANALYSIS EVAPORATION LANTHANUM MATERIALS SCIENCE MICROSTRUCTURE OXIDATION SCANNING ELECTRON MICROSCOPY STRONTIUM |
title | Characterization of Fe–Cr alloy metallic interconnects coated with LSMO using the aerosol deposition process |
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