Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications

At present flexible electronic devices are under extensive development and, among them, flexible organic light-emitting diode displays are the closest to a large market deployment. One of the remaining unsolved challenges is high throughput production of impermeable flexible transparent barrier laye...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2014-09, Vol.32 (5)
Hauptverfasser:	Maydannik, Philipp S., Kääriäinen, Tommi O., Lahtinen, Kimmo, Cameron, David C., Söderlund, Mikko, Soininen, Pekka, Johansson, Petri, Kuusipalo, Jurkka, Moro, Lorenza, Zeng, Xianghui
Format:	Artikel
Sprache:	eng
Schlagworte:	ALUMINIUM OXIDES DEPLETION LAYER DEPOSITION ELECTRONIC EQUIPMENT ENCAPSULATION LIGHT EMITTING DIODES MATERIALS SCIENCE POLYETHYLENES
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