Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)
We report on the thermal conductivity of atomic layer deposition-grown amorphous alumina thin films as a function of atomic density. Using time domain thermoreflectance, we measure the thermal conductivity of the thin alumina films at room temperature. The thermal conductivities vary ∼35% for a near...
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| Veröffentlicht in: | Applied physics letters 2014-06, Vol.104 (25) |
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| container_title | Applied physics letters |
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| creator | Gorham, Caroline S. Gaskins, John T. Parsons, Gregory N. Losego, Mark D. Hopkins, Patrick E. |
| description | We report on the thermal conductivity of atomic layer deposition-grown amorphous alumina thin films as a function of atomic density. Using time domain thermoreflectance, we measure the thermal conductivity of the thin alumina films at room temperature. The thermal conductivities vary ∼35% for a nearly 15% change in atomic density and are substrate independent. No density dependence of the longitudinal sound speeds is observed with picosecond acoustics. The density dependence of the thermal conductivity agrees well with a minimum limit to thermal conductivity model that is modified with a differential effective-medium approximation. |
| doi_str_mv | 10.1063/1.4885415 |
| format | Article |
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Using time domain thermoreflectance, we measure the thermal conductivity of the thin alumina films at room temperature. The thermal conductivities vary ∼35% for a nearly 15% change in atomic density and are substrate independent. No density dependence of the longitudinal sound speeds is observed with picosecond acoustics. The density dependence of the thermal conductivity agrees well with a minimum limit to thermal conductivity model that is modified with a differential effective-medium approximation.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.4885415</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>ACOUSTICS ; ALUMINIUM OXIDES ; Aluminum oxide ; Applied physics ; Atomic layer epitaxy ; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ; Conductivity ; DENSITY ; Effective medium theory ; Heat conductivity ; Heat transfer ; Herbivores ; Room temperature ; SOUND WAVES ; SUBSTRATES ; Temperature dependence ; TEMPERATURE RANGE 0273-0400 K ; THERMAL CONDUCTIVITY ; THIN FILMS ; VELOCITY</subject><ispartof>Applied physics letters, 2014-06, Vol.104 (25)</ispartof><rights>2014 AIP Publishing LLC.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c386t-85215b4c451e4366cde44915531182e183383d627668f8270c8c08b9a2fcb2d83</citedby><cites>FETCH-LOGICAL-c386t-85215b4c451e4366cde44915531182e183383d627668f8270c8c08b9a2fcb2d83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,784,885,27924,27925</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22303873$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Gorham, Caroline S.</creatorcontrib><creatorcontrib>Gaskins, John T.</creatorcontrib><creatorcontrib>Parsons, Gregory N.</creatorcontrib><creatorcontrib>Losego, Mark D.</creatorcontrib><creatorcontrib>Hopkins, Patrick E.</creatorcontrib><title>Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)</title><title>Applied physics letters</title><description>We report on the thermal conductivity of atomic layer deposition-grown amorphous alumina thin films as a function of atomic density. Using time domain thermoreflectance, we measure the thermal conductivity of the thin alumina films at room temperature. The thermal conductivities vary ∼35% for a nearly 15% change in atomic density and are substrate independent. No density dependence of the longitudinal sound speeds is observed with picosecond acoustics. The density dependence of the thermal conductivity agrees well with a minimum limit to thermal conductivity model that is modified with a differential effective-medium approximation.</description><subject>ACOUSTICS</subject><subject>ALUMINIUM OXIDES</subject><subject>Aluminum oxide</subject><subject>Applied physics</subject><subject>Atomic layer epitaxy</subject><subject>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</subject><subject>Conductivity</subject><subject>DENSITY</subject><subject>Effective medium theory</subject><subject>Heat conductivity</subject><subject>Heat transfer</subject><subject>Herbivores</subject><subject>Room temperature</subject><subject>SOUND WAVES</subject><subject>SUBSTRATES</subject><subject>Temperature dependence</subject><subject>TEMPERATURE RANGE 0273-0400 K</subject><subject>THERMAL CONDUCTIVITY</subject><subject>THIN FILMS</subject><subject>VELOCITY</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNpFkUtPwzAQhC0EEqVw4B9Y4kIPKX7EjnusylOq1AucLdfZ0FSJHWwHVH49iVqJ02pX34x2NAjdUjKnRPIHOs-VEjkVZ2hCSVFknFJ1jiaEEJ7JhaCX6CrG_bAKxvkE_T6Ci3U64BI6cCU4C9hXOO0AB-9bnKDtIJjUBxiPoTUNtt6VvU3196gbYJN8W1vcmAOE0ccPhrV32WfwPw6b1odu5_uITdO3tTP4ftmwDZ9do4vKNBFuTnOKPp6f3lev2Xrz8rZarjPLlUyZEoyKbW5zQSHnUtoS8nxBhRiTMaCKc8VLyQopVaVYQayyRG0XhlV2y0rFp-ju6OtjqnW0dQK7GzI4sEkzxglXBf-nuuC_eohJ730f3PCYZpRJoXKhyEDNjpQNPsYAle5C3Zpw0JTosQBN9akA_gfYF3ci</recordid><startdate>20140623</startdate><enddate>20140623</enddate><creator>Gorham, Caroline S.</creator><creator>Gaskins, John T.</creator><creator>Parsons, Gregory N.</creator><creator>Losego, Mark D.</creator><creator>Hopkins, Patrick E.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>OTOTI</scope></search><sort><creationdate>20140623</creationdate><title>Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)</title><author>Gorham, Caroline S. ; Gaskins, John T. ; Parsons, Gregory N. ; Losego, Mark D. ; Hopkins, Patrick E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c386t-85215b4c451e4366cde44915531182e183383d627668f8270c8c08b9a2fcb2d83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>ACOUSTICS</topic><topic>ALUMINIUM OXIDES</topic><topic>Aluminum oxide</topic><topic>Applied physics</topic><topic>Atomic layer epitaxy</topic><topic>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</topic><topic>Conductivity</topic><topic>DENSITY</topic><topic>Effective medium theory</topic><topic>Heat conductivity</topic><topic>Heat transfer</topic><topic>Herbivores</topic><topic>Room temperature</topic><topic>SOUND WAVES</topic><topic>SUBSTRATES</topic><topic>Temperature dependence</topic><topic>TEMPERATURE RANGE 0273-0400 K</topic><topic>THERMAL CONDUCTIVITY</topic><topic>THIN FILMS</topic><topic>VELOCITY</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gorham, Caroline S.</creatorcontrib><creatorcontrib>Gaskins, John T.</creatorcontrib><creatorcontrib>Parsons, Gregory N.</creatorcontrib><creatorcontrib>Losego, Mark D.</creatorcontrib><creatorcontrib>Hopkins, Patrick E.</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gorham, Caroline S.</au><au>Gaskins, John T.</au><au>Parsons, Gregory N.</au><au>Losego, Mark D.</au><au>Hopkins, Patrick E.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)</atitle><jtitle>Applied physics letters</jtitle><date>2014-06-23</date><risdate>2014</risdate><volume>104</volume><issue>25</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>We report on the thermal conductivity of atomic layer deposition-grown amorphous alumina thin films as a function of atomic density. Using time domain thermoreflectance, we measure the thermal conductivity of the thin alumina films at room temperature. The thermal conductivities vary ∼35% for a nearly 15% change in atomic density and are substrate independent. No density dependence of the longitudinal sound speeds is observed with picosecond acoustics. The density dependence of the thermal conductivity agrees well with a minimum limit to thermal conductivity model that is modified with a differential effective-medium approximation.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.4885415</doi><oa>free_for_read</oa></addata></record> |
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| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2014-06, Vol.104 (25) |
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| language | eng |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | ACOUSTICS ALUMINIUM OXIDES Aluminum oxide Applied physics Atomic layer epitaxy CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY Conductivity DENSITY Effective medium theory Heat conductivity Heat transfer Herbivores Room temperature SOUND WAVES SUBSTRATES Temperature dependence TEMPERATURE RANGE 0273-0400 K THERMAL CONDUCTIVITY THIN FILMS VELOCITY |
| title | Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3) |
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