Tunneling spectroscopy of superconducting MoN and NbTiN grown by atomic layer deposition

A tunneling spectroscopy study is presented of superconducting MoN and Nb{sub 0.8}Ti{sub 0.2}N thin films grown by atomic layer deposition (ALD). The films exhibited a superconducting gap of 2 meV and 2.4 meV, respectively, with a corresponding critical temperature of 11.5 K and 13.4 K, among the hi...

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Veröffentlicht in:Applied physics letters 2014-03, Vol.104 (9)
Hauptverfasser: Groll, Nickolas R., Klug, Jeffrey A., Claus, Helmut, Pellin, Michael J., Proslier, Thomas, Cao, Chaoyue, Becker, Nicholas G., Zasadzinski, John F., Department of Physics, Illinois Institute of Technology, Chicago, Illinois 60616, Altin, Serdar
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