Installation and commissioning of a large area coating system for neutron and X-ray optical devices
A 9 meter long DC/RF sputtering cylindrical coating system which is designed and built indigenously for coating of neutron supermirrors and grazing incidence hard X-ray mirrors on large area substrates has been installed and commissioned recently. The performance of the system has been tested by dep...
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| creator | Biswas, A Haque, Sk Maidul Misal, J Lagoo, K D Veerapur, R D Padmanabhan, M Puri, R K Sampathkumar, R Ajaykumar Bhattacharya Debarati Bhattacharyya, D Sahoo, N K |
| description | A 9 meter long DC/RF sputtering cylindrical coating system which is designed and built indigenously for coating of neutron supermirrors and grazing incidence hard X-ray mirrors on large area substrates has been installed and commissioned recently. The performance of the system has been tested by depositing Ti films on glass substrate of 1500mm X 150mm size. By depositing Ti films on several small area c-Si substrates placed over the length and breadth of the substrate holder, and by subsequent characterization by GIXR measurement, it has been observed that films with bulk-like density and very low surface roughness can be obtained in the above system. The thickness uniformity achieved in the deposited films is within ±3.5% over the 1500mm length and within ±4.8% over the 150mm width. |
| doi_str_mv | 10.1063/1.4872827 |
| format | Conference Proceeding |
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The performance of the system has been tested by depositing Ti films on glass substrate of 1500mm X 150mm size. By depositing Ti films on several small area c-Si substrates placed over the length and breadth of the substrate holder, and by subsequent characterization by GIXR measurement, it has been observed that films with bulk-like density and very low surface roughness can be obtained in the above system. The thickness uniformity achieved in the deposited films is within ±3.5% over the 1500mm length and within ±4.8% over the 150mm width.</description><identifier>ISSN: 0094-243X</identifier><identifier>EISSN: 1551-7616</identifier><identifier>DOI: 10.1063/1.4872827</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Bulk density ; Coating ; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ; GLASS ; Glass substrates ; HARD X RADIATION ; INCIDENCE ANGLE ; MIRRORS ; Protective coatings ; ROUGHNESS ; SILICON ; Silicon substrates ; SPECTRAL REFLECTANCE ; SPUTTERING ; SUBSTRATES ; Surface roughness ; SURFACES ; THIN FILMS ; TITANIUM ; X ray mirrors</subject><ispartof>AIP Conference Proceedings, 2014, Vol.1591 (1), p.987</ispartof><rights>2014 AIP Publishing LLC.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,309,310,314,780,784,789,790,885,23930,23931,25140,27924,27925</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/22271080$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Biswas, A</creatorcontrib><creatorcontrib>Haque, Sk Maidul</creatorcontrib><creatorcontrib>Misal, J</creatorcontrib><creatorcontrib>Lagoo, K D</creatorcontrib><creatorcontrib>Veerapur, R D</creatorcontrib><creatorcontrib>Padmanabhan, M</creatorcontrib><creatorcontrib>Puri, R K</creatorcontrib><creatorcontrib>Sampathkumar, R</creatorcontrib><creatorcontrib>Ajaykumar</creatorcontrib><creatorcontrib>Bhattacharya Debarati</creatorcontrib><creatorcontrib>Bhattacharyya, D</creatorcontrib><creatorcontrib>Sahoo, N K</creatorcontrib><title>Installation and commissioning of a large area coating system for neutron and X-ray optical devices</title><title>AIP Conference Proceedings</title><description>A 9 meter long DC/RF sputtering cylindrical coating system which is designed and built indigenously for coating of neutron supermirrors and grazing incidence hard X-ray mirrors on large area substrates has been installed and commissioned recently. The performance of the system has been tested by depositing Ti films on glass substrate of 1500mm X 150mm size. By depositing Ti films on several small area c-Si substrates placed over the length and breadth of the substrate holder, and by subsequent characterization by GIXR measurement, it has been observed that films with bulk-like density and very low surface roughness can be obtained in the above system. The thickness uniformity achieved in the deposited films is within ±3.5% over the 1500mm length and within ±4.8% over the 150mm width.</description><subject>Bulk density</subject><subject>Coating</subject><subject>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</subject><subject>GLASS</subject><subject>Glass substrates</subject><subject>HARD X RADIATION</subject><subject>INCIDENCE ANGLE</subject><subject>MIRRORS</subject><subject>Protective coatings</subject><subject>ROUGHNESS</subject><subject>SILICON</subject><subject>Silicon substrates</subject><subject>SPECTRAL REFLECTANCE</subject><subject>SPUTTERING</subject><subject>SUBSTRATES</subject><subject>Surface roughness</subject><subject>SURFACES</subject><subject>THIN FILMS</subject><subject>TITANIUM</subject><subject>X ray mirrors</subject><issn>0094-243X</issn><issn>1551-7616</issn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2014</creationdate><recordtype>conference_proceeding</recordtype><recordid>eNpFkM1LAzEQxYMoWKsH_4OA563J5Gv3KMWPQsGLQm_LbDapW7ZJ3aRC_3sDFjw9Zt6b4ccj5J6zBWdaPPKFrA3UYC7IjCvFK6O5viQzxhpZgRSba3KT0o4xaIypZ8SuQso4jpiHGCiGntq43w8plXEIWxo9RTritHUUJ4fFLcmyT6eU3Z76ONHgjnk6H2-qCU80HvJgcaS9-xmsS7fkyuOY3N1Z5-Tz5flj-Vat319Xy6d1FYHzXLlCpDtvmFW119J3YJy2vdO1RKt0gbemU43nvbdC1A5AokLRMYnQowQxJw9_f2PKQ5vskJ39sjEEZ3MLAIazmv2nDlP8PrqU2108TqGAtcDB6NJdo8QvX9ZjFA</recordid><startdate>20140424</startdate><enddate>20140424</enddate><creator>Biswas, A</creator><creator>Haque, Sk Maidul</creator><creator>Misal, J</creator><creator>Lagoo, K D</creator><creator>Veerapur, R D</creator><creator>Padmanabhan, M</creator><creator>Puri, R K</creator><creator>Sampathkumar, R</creator><creator>Ajaykumar</creator><creator>Bhattacharya Debarati</creator><creator>Bhattacharyya, D</creator><creator>Sahoo, N K</creator><general>American Institute of Physics</general><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>OTOTI</scope></search><sort><creationdate>20140424</creationdate><title>Installation and commissioning of a large area coating system for neutron and X-ray optical devices</title><author>Biswas, A ; Haque, Sk Maidul ; Misal, J ; Lagoo, K D ; Veerapur, R D ; Padmanabhan, M ; Puri, R K ; Sampathkumar, R ; Ajaykumar ; Bhattacharya Debarati ; Bhattacharyya, D ; Sahoo, N K</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-o211t-e9776bf70c58f64fb27e6cde684ac56243c7b59f1dfc338e224a5a3b04a2da423</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Bulk density</topic><topic>Coating</topic><topic>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</topic><topic>GLASS</topic><topic>Glass substrates</topic><topic>HARD X RADIATION</topic><topic>INCIDENCE ANGLE</topic><topic>MIRRORS</topic><topic>Protective coatings</topic><topic>ROUGHNESS</topic><topic>SILICON</topic><topic>Silicon substrates</topic><topic>SPECTRAL REFLECTANCE</topic><topic>SPUTTERING</topic><topic>SUBSTRATES</topic><topic>Surface roughness</topic><topic>SURFACES</topic><topic>THIN FILMS</topic><topic>TITANIUM</topic><topic>X ray mirrors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Biswas, A</creatorcontrib><creatorcontrib>Haque, Sk Maidul</creatorcontrib><creatorcontrib>Misal, J</creatorcontrib><creatorcontrib>Lagoo, K D</creatorcontrib><creatorcontrib>Veerapur, R D</creatorcontrib><creatorcontrib>Padmanabhan, M</creatorcontrib><creatorcontrib>Puri, R K</creatorcontrib><creatorcontrib>Sampathkumar, R</creatorcontrib><creatorcontrib>Ajaykumar</creatorcontrib><creatorcontrib>Bhattacharya Debarati</creatorcontrib><creatorcontrib>Bhattacharyya, D</creatorcontrib><creatorcontrib>Sahoo, N K</creatorcontrib><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>OSTI.GOV</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Biswas, A</au><au>Haque, Sk Maidul</au><au>Misal, J</au><au>Lagoo, K D</au><au>Veerapur, R D</au><au>Padmanabhan, M</au><au>Puri, R K</au><au>Sampathkumar, R</au><au>Ajaykumar</au><au>Bhattacharya Debarati</au><au>Bhattacharyya, D</au><au>Sahoo, N K</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Installation and commissioning of a large area coating system for neutron and X-ray optical devices</atitle><btitle>AIP Conference Proceedings</btitle><date>2014-04-24</date><risdate>2014</risdate><volume>1591</volume><issue>1</issue><epage>987</epage><issn>0094-243X</issn><eissn>1551-7616</eissn><abstract>A 9 meter long DC/RF sputtering cylindrical coating system which is designed and built indigenously for coating of neutron supermirrors and grazing incidence hard X-ray mirrors on large area substrates has been installed and commissioned recently. The performance of the system has been tested by depositing Ti films on glass substrate of 1500mm X 150mm size. By depositing Ti films on several small area c-Si substrates placed over the length and breadth of the substrate holder, and by subsequent characterization by GIXR measurement, it has been observed that films with bulk-like density and very low surface roughness can be obtained in the above system. The thickness uniformity achieved in the deposited films is within ±3.5% over the 1500mm length and within ±4.8% over the 150mm width.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.4872827</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0094-243X |
| ispartof | AIP Conference Proceedings, 2014, Vol.1591 (1), p.987 |
| issn | 0094-243X 1551-7616 |
| language | eng |
| recordid | cdi_osti_scitechconnect_22271080 |
| source | AIP Journals Complete |
| subjects | Bulk density Coating CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY GLASS Glass substrates HARD X RADIATION INCIDENCE ANGLE MIRRORS Protective coatings ROUGHNESS SILICON Silicon substrates SPECTRAL REFLECTANCE SPUTTERING SUBSTRATES Surface roughness SURFACES THIN FILMS TITANIUM X ray mirrors |
| title | Installation and commissioning of a large area coating system for neutron and X-ray optical devices |
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