Focused-ion-beam induced damage in thin films of complex oxide BiFeO{sub 3}

An unexpected, strong deterioration of crystal quality is observed in epitaxial perovskite BiFeO{sub 3} films in which microscale features have been patterned by focused-ion-beam (FIB) milling. Specifically, synchrotron x-ray microdiffraction shows that the damaged region extends to tens of μm, but...

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Veröffentlicht in:	APL materials 2014-02, Vol.2 (2)
Hauptverfasser:	Siemons, W., Beekman, C., Budai, J. D., Christen, H. M., Fowlkes, J. D., Balke, N., Tischler, J. Z., Xu, R., Liu, W., Gonzales, C. M.
Format:	Artikel
Sprache:	eng
Schlagworte:	CRYSTALS EPITAXY ION BEAMS LAYERS MATERIALS SCIENCE NANOSCIENCE AND NANOTECHNOLOGY NANOSTRUCTURES OXIDES PEROVSKITE SYNCHROTRONS THIN FILMS X RADIATION
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