Pyroelectric response of lead zirconate titanate thin films on silicon: Effect of thermal stresses

Ferroelectric lead zirconate titanate [Pb(ZrxTi1-xO)3, (PZT x:1-x)] has received considerable interest for applications related to uncooled infrared devices due to its large pyroelectric figures of merit near room temperature, and the fact that such devices are inherently ac coupled, allowing for si...

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Veröffentlicht in:	Journal of applied physics 2013-11, Vol.114 (20)
Hauptverfasser:	Kesim, M T, Zhang, J, Trolier-McKinstry, S, Mantese, J V, Whatmore, R W, Alpay, S P
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Composition COOLING Deposition FERROELECTRIC MATERIALS Ferroelectricity Lead Lead zirconate titanates Linear polarization Material properties MATERIALS SCIENCE OPTIMIZATION PHASE TRANSFORMATIONS Phase transitions POLARIZATION POLYCRYSTALS PZT SILICON SUBSTRATES Thermal mismatch Thermal stress THERMAL STRESSES THERMODYNAMIC MODEL Thermodynamic models THIN FILMS Transformation temperature
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