Plasma characteristics of single- and dual-electrode ion source systems utilized in low-energy ion extraction

Discharge characteristics in the upstream as well as in the downstream regions of a 50-eV positive ion beam were measured along the beam axis. Single- and dual-electrode configurations made of 0.1-mm diameter tungsten wires were tested. By varying the upstream discharge parameters, the shape of the...

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Veröffentlicht in:Review of scientific instruments 2014-02, Vol.85 (2), p.02A717-02A717
Hauptverfasser: Vasquez, Jr, M R, Tokumura, S, Kasuya, T, Wada, M
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Sprache:eng
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