Electrical properties and thermal stability of Pd-doped copper nitride films

Pd-doped copper nitride films with Pd concentrations up to 5.6 at. % were successfully synthesized by reactive magnetron sputtering of metal targets. Higher concentration of Pd (>5.6 at. %) would deteriorate the quality of the deposits. XPS and XRD data strongly suggest that Pd atoms occupy the c...

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Veröffentlicht in:	Journal of applied physics 2013-01, Vol.113 (4)
Hauptverfasser:	Ji, A. L., Lu, N. P., Gao, L., Zhang, W. B., Liao, L. G., Cao, Z. X.
Format:	Artikel
Sprache:	eng
Schlagworte:	ANNEALING CARRIER DENSITY CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY Copper COPPER NITRIDES DEPOSITION DOPED MATERIALS ELECTRIC CONDUCTIVITY Magnetron sputtering MATERIALS SCIENCE Nitrides Palladium PALLADIUM ADDITIONS PYROLYSIS REDUCTION SPUTTERING STABILITY Thermal stability THIN FILMS X-RAY DIFFRACTION X-RAY PHOTOELECTRON SPECTROSCOPY
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