Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source
A plasma sputter-type negative ion source is utilized to produce and detect negative Zr ions with energies between 150 and 450 eV via a retarding potential-type electrostatic energy analyzer. Traditional and modified semi-cylindrical Faraday cups (FC) inside the analyzer are employed to sample negat...
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| Veröffentlicht in: | Review of scientific instruments 2012-02, Vol.83 (2), p.02B704-02B704-4 |
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| creator | Malapit, Giovanni M. Mahinay, Christian Lorenz S. Poral, Matthew D. Ramos, Henry J. |
| description | A plasma sputter-type negative ion source is utilized to produce and detect negative Zr ions with energies between 150 and 450 eV via a retarding potential-type electrostatic energy analyzer. Traditional and modified semi-cylindrical Faraday cups (FC) inside the analyzer are employed to sample negative Zr ions and measure corresponding ion currents. The traditional FC registered indistinct ion current readings which are attributed to backscattering of ions and secondary electron emissions. The modified Faraday cup with biased repeller guard ring, cut out these signal distortions leaving only ringings as issues which are theoretically compensated by fitting a sigmoidal function into the data. The mean energy and energy spread are calculated using the ion current versus retarding potential data while the beam width values are determined from the data of the transverse measurement of ion current. The most energetic negative Zr ions yield tighter energy spread at 4.11 eV compared to the least energetic negative Zr ions at 4.79 eV. The smallest calculated beam width is 1.04 cm for the negative Zr ions with the highest mean energy indicating a more focused beam in contrast to the less energetic negative Zr ions due to space charge forces. |
| doi_str_mv | 10.1063/1.3665966 |
| format | Article |
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Traditional and modified semi-cylindrical Faraday cups (FC) inside the analyzer are employed to sample negative Zr ions and measure corresponding ion currents. The traditional FC registered indistinct ion current readings which are attributed to backscattering of ions and secondary electron emissions. The modified Faraday cup with biased repeller guard ring, cut out these signal distortions leaving only ringings as issues which are theoretically compensated by fitting a sigmoidal function into the data. The mean energy and energy spread are calculated using the ion current versus retarding potential data while the beam width values are determined from the data of the transverse measurement of ion current. The most energetic negative Zr ions yield tighter energy spread at 4.11 eV compared to the least energetic negative Zr ions at 4.79 eV. The smallest calculated beam width is 1.04 cm for the negative Zr ions with the highest mean energy indicating a more focused beam in contrast to the less energetic negative Zr ions due to space charge forces.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.3665966</identifier><identifier>PMID: 22380309</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>ANIONS ; BACKSCATTERING ; BEAM PROFILES ; Beams (radiation) ; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ; CURRENTS ; CYLINDRICAL CONFIGURATION ; ELECTRON EMISSION ; Electrostatics ; Energy use ; EV RANGE ; FARADAY CUPS ; ION BEAMS ; Ion currents ; ION SOURCES ; Mathematical analysis ; PARTICLE ACCELERATORS ; PLASMA ; Plasma Gases - chemistry ; Radiometry - instrumentation ; Retarding ; SIGNAL DISTORTION ; SPACE CHARGE ; Spreads ; SPUTTERING ; Static Electricity ; Zirconium - chemistry ; ZIRCONIUM IONS</subject><ispartof>Review of scientific instruments, 2012-02, Vol.83 (2), p.02B704-02B704-4</ispartof><rights>2012 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c400t-609253df3947f4b67ede4ace76187b2cfc8f6511f59527c3c957efa19b78b45d3</citedby><cites>FETCH-LOGICAL-c400t-609253df3947f4b67ede4ace76187b2cfc8f6511f59527c3c957efa19b78b45d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.3665966$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,776,780,790,881,1553,4498,27901,27902,76126,76132</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/22380309$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink><backlink>$$Uhttps://www.osti.gov/biblio/22085915$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Malapit, Giovanni M.</creatorcontrib><creatorcontrib>Mahinay, Christian Lorenz S.</creatorcontrib><creatorcontrib>Poral, Matthew D.</creatorcontrib><creatorcontrib>Ramos, Henry J.</creatorcontrib><title>Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source</title><title>Review of scientific instruments</title><addtitle>Rev Sci Instrum</addtitle><description>A plasma sputter-type negative ion source is utilized to produce and detect negative Zr ions with energies between 150 and 450 eV via a retarding potential-type electrostatic energy analyzer. Traditional and modified semi-cylindrical Faraday cups (FC) inside the analyzer are employed to sample negative Zr ions and measure corresponding ion currents. The traditional FC registered indistinct ion current readings which are attributed to backscattering of ions and secondary electron emissions. The modified Faraday cup with biased repeller guard ring, cut out these signal distortions leaving only ringings as issues which are theoretically compensated by fitting a sigmoidal function into the data. The mean energy and energy spread are calculated using the ion current versus retarding potential data while the beam width values are determined from the data of the transverse measurement of ion current. The most energetic negative Zr ions yield tighter energy spread at 4.11 eV compared to the least energetic negative Zr ions at 4.79 eV. The smallest calculated beam width is 1.04 cm for the negative Zr ions with the highest mean energy indicating a more focused beam in contrast to the less energetic negative Zr ions due to space charge forces.</description><subject>ANIONS</subject><subject>BACKSCATTERING</subject><subject>BEAM PROFILES</subject><subject>Beams (radiation)</subject><subject>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</subject><subject>CURRENTS</subject><subject>CYLINDRICAL CONFIGURATION</subject><subject>ELECTRON EMISSION</subject><subject>Electrostatics</subject><subject>Energy use</subject><subject>EV RANGE</subject><subject>FARADAY CUPS</subject><subject>ION BEAMS</subject><subject>Ion currents</subject><subject>ION SOURCES</subject><subject>Mathematical analysis</subject><subject>PARTICLE ACCELERATORS</subject><subject>PLASMA</subject><subject>Plasma Gases - chemistry</subject><subject>Radiometry - instrumentation</subject><subject>Retarding</subject><subject>SIGNAL DISTORTION</subject><subject>SPACE CHARGE</subject><subject>Spreads</subject><subject>SPUTTERING</subject><subject>Static Electricity</subject><subject>Zirconium - chemistry</subject><subject>ZIRCONIUM IONS</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><sourceid>EIF</sourceid><recordid>eNp9kc1rFTEUxYMo9lld-A9IwIV1MTUfk2SyEaTUDyi40XXI5N3UyCQzJhnldeO_3pR5FVxoNhfCj3PvOQeh55ScUyL5G3rOpRRaygdoR8mgOyUZf4h2hPC-k6ofTtCTUr6T9gSlj9EJY3wgnOgd-n05gat5LtXW4DAkyNcHbJOdDjeQcQRb1gwRUi149niaf90zNyG7OYU14hFsxIvNNkKFXHBI2OJlsiVaXJa1ts-uHhbACa7blp-Aw5xwmdfs4Cl65O1U4NlxnqKv7y-_XHzsrj5_-HTx7qpzPSG1k0Qzwfee6175fpQK9tBbB0rSQY3MeTd42bx5oQVTjjstFHhL9aiGsRd7fopebrrNaTDFhQruW7s_NfeGMTIITUWjXm3UkucfK5RqYigOpskmmNdiNJNUKKlpI8_-S9Ke6UG2vFVDX2-oazGXDN4sOUSbD4YSc9efoebYX2NfHGXXMcL-D3lfWAPebsCdhRbmnP6t9le1ZquN3wLrv6xo</recordid><startdate>20120201</startdate><enddate>20120201</enddate><creator>Malapit, Giovanni M.</creator><creator>Mahinay, Christian Lorenz S.</creator><creator>Poral, Matthew D.</creator><creator>Ramos, Henry J.</creator><general>American Institute of Physics</general><scope>CGR</scope><scope>CUY</scope><scope>CVF</scope><scope>ECM</scope><scope>EIF</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>7X8</scope><scope>OTOTI</scope></search><sort><creationdate>20120201</creationdate><title>Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source</title><author>Malapit, Giovanni M. ; Mahinay, Christian Lorenz S. ; Poral, Matthew D. ; Ramos, Henry J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c400t-609253df3947f4b67ede4ace76187b2cfc8f6511f59527c3c957efa19b78b45d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>ANIONS</topic><topic>BACKSCATTERING</topic><topic>BEAM PROFILES</topic><topic>Beams (radiation)</topic><topic>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</topic><topic>CURRENTS</topic><topic>CYLINDRICAL CONFIGURATION</topic><topic>ELECTRON EMISSION</topic><topic>Electrostatics</topic><topic>Energy use</topic><topic>EV RANGE</topic><topic>FARADAY CUPS</topic><topic>ION BEAMS</topic><topic>Ion currents</topic><topic>ION SOURCES</topic><topic>Mathematical analysis</topic><topic>PARTICLE ACCELERATORS</topic><topic>PLASMA</topic><topic>Plasma Gases - chemistry</topic><topic>Radiometry - instrumentation</topic><topic>Retarding</topic><topic>SIGNAL DISTORTION</topic><topic>SPACE CHARGE</topic><topic>Spreads</topic><topic>SPUTTERING</topic><topic>Static Electricity</topic><topic>Zirconium - chemistry</topic><topic>ZIRCONIUM IONS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Malapit, Giovanni M.</creatorcontrib><creatorcontrib>Mahinay, Christian Lorenz S.</creatorcontrib><creatorcontrib>Poral, Matthew D.</creatorcontrib><creatorcontrib>Ramos, Henry J.</creatorcontrib><collection>Medline</collection><collection>MEDLINE</collection><collection>MEDLINE (Ovid)</collection><collection>MEDLINE</collection><collection>MEDLINE</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><collection>OSTI.GOV</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Malapit, Giovanni M.</au><au>Mahinay, Christian Lorenz S.</au><au>Poral, Matthew D.</au><au>Ramos, Henry J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source</atitle><jtitle>Review of scientific instruments</jtitle><addtitle>Rev Sci Instrum</addtitle><date>2012-02-01</date><risdate>2012</risdate><volume>83</volume><issue>2</issue><spage>02B704</spage><epage>02B704-4</epage><pages>02B704-02B704-4</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>A plasma sputter-type negative ion source is utilized to produce and detect negative Zr ions with energies between 150 and 450 eV via a retarding potential-type electrostatic energy analyzer. Traditional and modified semi-cylindrical Faraday cups (FC) inside the analyzer are employed to sample negative Zr ions and measure corresponding ion currents. The traditional FC registered indistinct ion current readings which are attributed to backscattering of ions and secondary electron emissions. The modified Faraday cup with biased repeller guard ring, cut out these signal distortions leaving only ringings as issues which are theoretically compensated by fitting a sigmoidal function into the data. The mean energy and energy spread are calculated using the ion current versus retarding potential data while the beam width values are determined from the data of the transverse measurement of ion current. The most energetic negative Zr ions yield tighter energy spread at 4.11 eV compared to the least energetic negative Zr ions at 4.79 eV. The smallest calculated beam width is 1.04 cm for the negative Zr ions with the highest mean energy indicating a more focused beam in contrast to the less energetic negative Zr ions due to space charge forces.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><pmid>22380309</pmid><doi>10.1063/1.3665966</doi></addata></record> |
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| source | MEDLINE; AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | ANIONS BACKSCATTERING BEAM PROFILES Beams (radiation) CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY CURRENTS CYLINDRICAL CONFIGURATION ELECTRON EMISSION Electrostatics Energy use EV RANGE FARADAY CUPS ION BEAMS Ion currents ION SOURCES Mathematical analysis PARTICLE ACCELERATORS PLASMA Plasma Gases - chemistry Radiometry - instrumentation Retarding SIGNAL DISTORTION SPACE CHARGE Spreads SPUTTERING Static Electricity Zirconium - chemistry ZIRCONIUM IONS |
| title | Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion source |
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