The second generation Singapore high resolution proton beam writing facility
A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a varie...
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| Veröffentlicht in: | Review of scientific instruments 2012-02, Vol.83 (2), p.02B902-02B902-3 |
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| container_end_page | 02B902-3 |
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| container_issue | 2 |
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| container_title | Review of scientific instruments |
| container_volume | 83 |
| creator | van Kan, J. A. Malar, P. Baysic de Vera, Armin |
| description | A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm
2
and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed. |
| doi_str_mv | 10.1063/1.3662205 |
| format | Article |
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2
and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.3662205</identifier><identifier>PMID: 22380334</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>ASPECT RATIO ; BEAM PROFILES ; Beams (radiation) ; DENSITY ; ELECTROMAGNETIC LENSES ; FOCUSING ; INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY ; MEV RANGE ; Nanocomposites ; Nanomaterials ; Nanostructure ; NANOSTRUCTURES ; PARTICLE ACCELERATORS ; PERFORMANCE TESTING ; PROTON BEAMS ; Quadrupoles ; RESOLUTION ; Three dimensional</subject><ispartof>Review of scientific instruments, 2012-02, Vol.83 (2), p.02B902-02B902-3</ispartof><rights>2012 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c400t-1a24a231dea7b212335f1bb8a5db185b13d2079c4f825031d174eb8a68ba7ed3</citedby><cites>FETCH-LOGICAL-c400t-1a24a231dea7b212335f1bb8a5db185b13d2079c4f825031d174eb8a68ba7ed3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.3662205$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,780,784,794,885,1559,4512,27924,27925,76384,76390</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/22380334$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink><backlink>$$Uhttps://www.osti.gov/biblio/22066328$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>van Kan, J. A.</creatorcontrib><creatorcontrib>Malar, P.</creatorcontrib><creatorcontrib>Baysic de Vera, Armin</creatorcontrib><title>The second generation Singapore high resolution proton beam writing facility</title><title>Review of scientific instruments</title><addtitle>Rev Sci Instrum</addtitle><description>A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm
2
and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed.</description><subject>ASPECT RATIO</subject><subject>BEAM PROFILES</subject><subject>Beams (radiation)</subject><subject>DENSITY</subject><subject>ELECTROMAGNETIC LENSES</subject><subject>FOCUSING</subject><subject>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</subject><subject>MEV RANGE</subject><subject>Nanocomposites</subject><subject>Nanomaterials</subject><subject>Nanostructure</subject><subject>NANOSTRUCTURES</subject><subject>PARTICLE ACCELERATORS</subject><subject>PERFORMANCE TESTING</subject><subject>PROTON BEAMS</subject><subject>Quadrupoles</subject><subject>RESOLUTION</subject><subject>Three dimensional</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNp90U1PxCAQBmBiNLp-HPwDpokH9VBloFB6MTHGr2QTD-6dUDrdxXTbFdgY_71oV2_KZQ48GZh5CTkGeglU8iu45FIyRsUWmQBVVV5KxrfJhFJe5LIs1B7ZD-GVpiMAdskeY1xRzosJmc4WmAW0Q99kc-zRm-iGPntx_dysBo_Zws0XmccwdOvvm5UfYio1mmX27l1MMGuNdZ2LH4dkpzVdwKNNPSCz-7vZ7WM-fX54ur2Z5ragNOZgWGEYhwZNWTNgnIsW6loZ0dSgRA28YbSsbNEqJmhyUBaYrqWqTYkNPyCnY9shRKeDdRHtIk3Qo406rUFKzlRSZ6NKP35bY4h66YLFrjM9DuugKyZB8PR4kuf_SihYpUQlqUj0YqTWDyF4bPXKu6XxHxqo_spCg95kkezJpu26XmLzK3-Wn8D1CL5G-N77391STHqMSf_GxD8BC0iXxQ</recordid><startdate>20120201</startdate><enddate>20120201</enddate><creator>van Kan, J. A.</creator><creator>Malar, P.</creator><creator>Baysic de Vera, Armin</creator><general>American Institute of Physics</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>7X8</scope><scope>OTOTI</scope></search><sort><creationdate>20120201</creationdate><title>The second generation Singapore high resolution proton beam writing facility</title><author>van Kan, J. A. ; Malar, P. ; Baysic de Vera, Armin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c400t-1a24a231dea7b212335f1bb8a5db185b13d2079c4f825031d174eb8a68ba7ed3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>ASPECT RATIO</topic><topic>BEAM PROFILES</topic><topic>Beams (radiation)</topic><topic>DENSITY</topic><topic>ELECTROMAGNETIC LENSES</topic><topic>FOCUSING</topic><topic>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</topic><topic>MEV RANGE</topic><topic>Nanocomposites</topic><topic>Nanomaterials</topic><topic>Nanostructure</topic><topic>NANOSTRUCTURES</topic><topic>PARTICLE ACCELERATORS</topic><topic>PERFORMANCE TESTING</topic><topic>PROTON BEAMS</topic><topic>Quadrupoles</topic><topic>RESOLUTION</topic><topic>Three dimensional</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>van Kan, J. A.</creatorcontrib><creatorcontrib>Malar, P.</creatorcontrib><creatorcontrib>Baysic de Vera, Armin</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><collection>OSTI.GOV</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>van Kan, J. A.</au><au>Malar, P.</au><au>Baysic de Vera, Armin</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The second generation Singapore high resolution proton beam writing facility</atitle><jtitle>Review of scientific instruments</jtitle><addtitle>Rev Sci Instrum</addtitle><date>2012-02-01</date><risdate>2012</risdate><volume>83</volume><issue>2</issue><spage>02B902</spage><epage>02B902-3</epage><pages>02B902-02B902-3</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm
2
and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><pmid>22380334</pmid><doi>10.1063/1.3662205</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0034-6748 |
| ispartof | Review of scientific instruments, 2012-02, Vol.83 (2), p.02B902-02B902-3 |
| issn | 0034-6748 1089-7623 |
| language | eng |
| recordid | cdi_osti_scitechconnect_22066328 |
| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | ASPECT RATIO BEAM PROFILES Beams (radiation) DENSITY ELECTROMAGNETIC LENSES FOCUSING INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY MEV RANGE Nanocomposites Nanomaterials Nanostructure NANOSTRUCTURES PARTICLE ACCELERATORS PERFORMANCE TESTING PROTON BEAMS Quadrupoles RESOLUTION Three dimensional |
| title | The second generation Singapore high resolution proton beam writing facility |
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