Radio frequency discharge with control of plasma potential distribution

A RF discharge plasma generator with additional electrodes for independent control of plasma potential distribution is proposed. With positive biasing of this ring electrode relative end flanges and longitudinal magnetic field a confinement of fast electrons in the discharge will be improved for rel...

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Bibliographische Detailangaben
Veröffentlicht in:	Review of scientific instruments 2012-02, Vol.83 (2), p.02A720-02A720-3
Hauptverfasser:	Dudnikov, Vadim, Dudnikov, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acceptability Confinement Discharge EFFICIENCY Electrodes ELECTRONS Gas density HIGH-FREQUENCY DISCHARGES ION SOURCES MAGNETIC FIELDS PARTICLE ACCELERATORS PLASMA CONFINEMENT PLASMA POTENTIAL Plasma potentials PLASMA PRODUCTION Radio frequencies RADIOWAVE RADIATION SPUTTERING
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