On the implementation of computed laminography using synchrotron radiation
Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for sp...
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| Veröffentlicht in: | Review of scientific instruments 2011-06, Vol.82 (6), p.063702-063702-8 |
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| container_end_page | 063702-8 |
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| container_issue | 6 |
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| container_title | Review of scientific instruments |
| container_volume | 82 |
| creator | Helfen, L. Myagotin, A. Mikulík, P. Pernot, P. Voropaev, A. Elyyan, M. Di Michiel, M. Baruchel, J. Baumbach, T. |
| description | Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology. |
| doi_str_mv | 10.1063/1.3596566 |
| format | Article |
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Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. 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Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.</description><subject>ALIGNMENT</subject><subject>COMPUTERIZED TOMOGRAPHY</subject><subject>HARD X RADIATION</subject><subject>IMAGE PROCESSING</subject><subject>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</subject><subject>MONOCHROMATIC RADIATION</subject><subject>PARTICLE ACCELERATORS</subject><subject>PHOTON BEAMS</subject><subject>SENSITIVITY</subject><subject>SPATIAL RESOLUTION</subject><subject>SYNCHROTRON RADIATION</subject><subject>SYNCHROTRON RADIATION SOURCES</subject><subject>THREE-DIMENSIONAL CALCULATIONS</subject><subject>VISIBLE RADIATION</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp9kF1LHDEUhoModbW98A_IgBdiYWw-JpmZm4KIbZWFvbHXYTY5cSMzyZhkCvvvjbvbFhHNzcmB57yc8yB0QvAlwYJ9I5eMt4ILsYdmBDdtWQvK9tEMY1aVoq6aQ3QU4yPOjxPyCR1SUlMi2nqG7hauSCso7DD2MIBLXbLeFd4Uyg_jlEAXfTdY5x9CN67WxRSteyji2qlV8ClkNHTaboY-owPT9RG-7Oox-v3j5v76Vzlf_Ly9vpqXimOWSmCsI6LWlcm94QxMuxQkf3RDdM0x5y2mhuplayijjCuuagqiwg0oXQNnx-hsm-tjsjIqm0CtlHcOVJKU4ny7IJk631Jj8E8TxCQHGxX0fefAT1E2TVVRwUmbyYstqYKPMYCRY7BDF9aSYPniVxK585vZ013qtBxA_yP_Cs3A9y3wstdGy_tpCyezevlKfQ74-l7AHx_-D8tRm4_gt7s_A2d7pr0</recordid><startdate>20110601</startdate><enddate>20110601</enddate><creator>Helfen, L.</creator><creator>Myagotin, A.</creator><creator>Mikulík, P.</creator><creator>Pernot, P.</creator><creator>Voropaev, A.</creator><creator>Elyyan, M.</creator><creator>Di Michiel, M.</creator><creator>Baruchel, J.</creator><creator>Baumbach, T.</creator><general>American Institute of Physics</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>OTOTI</scope></search><sort><creationdate>20110601</creationdate><title>On the implementation of computed laminography using synchrotron radiation</title><author>Helfen, L. ; Myagotin, A. ; Mikulík, P. ; Pernot, P. ; Voropaev, A. ; Elyyan, M. ; Di Michiel, M. ; Baruchel, J. ; Baumbach, T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c503t-e33a167d4fc50f53ef9b61f53d81d75055902f2db9f23235c5c72e6408ecd7e53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>ALIGNMENT</topic><topic>COMPUTERIZED TOMOGRAPHY</topic><topic>HARD X RADIATION</topic><topic>IMAGE PROCESSING</topic><topic>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</topic><topic>MONOCHROMATIC RADIATION</topic><topic>PARTICLE ACCELERATORS</topic><topic>PHOTON BEAMS</topic><topic>SENSITIVITY</topic><topic>SPATIAL RESOLUTION</topic><topic>SYNCHROTRON RADIATION</topic><topic>SYNCHROTRON RADIATION SOURCES</topic><topic>THREE-DIMENSIONAL CALCULATIONS</topic><topic>VISIBLE RADIATION</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Helfen, L.</creatorcontrib><creatorcontrib>Myagotin, A.</creatorcontrib><creatorcontrib>Mikulík, P.</creatorcontrib><creatorcontrib>Pernot, P.</creatorcontrib><creatorcontrib>Voropaev, A.</creatorcontrib><creatorcontrib>Elyyan, M.</creatorcontrib><creatorcontrib>Di Michiel, M.</creatorcontrib><creatorcontrib>Baruchel, J.</creatorcontrib><creatorcontrib>Baumbach, T.</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>OSTI.GOV</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Helfen, L.</au><au>Myagotin, A.</au><au>Mikulík, P.</au><au>Pernot, P.</au><au>Voropaev, A.</au><au>Elyyan, M.</au><au>Di Michiel, M.</au><au>Baruchel, J.</au><au>Baumbach, T.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>On the implementation of computed laminography using synchrotron radiation</atitle><jtitle>Review of scientific instruments</jtitle><addtitle>Rev Sci Instrum</addtitle><date>2011-06-01</date><risdate>2011</risdate><volume>82</volume><issue>6</issue><spage>063702</spage><epage>063702-8</epage><pages>063702-063702-8</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. 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| identifier | ISSN: 0034-6748 |
| ispartof | Review of scientific instruments, 2011-06, Vol.82 (6), p.063702-063702-8 |
| issn | 0034-6748 1089-7623 |
| language | eng |
| recordid | cdi_osti_scitechconnect_22062361 |
| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | ALIGNMENT COMPUTERIZED TOMOGRAPHY HARD X RADIATION IMAGE PROCESSING INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY MONOCHROMATIC RADIATION PARTICLE ACCELERATORS PHOTON BEAMS SENSITIVITY SPATIAL RESOLUTION SYNCHROTRON RADIATION SYNCHROTRON RADIATION SOURCES THREE-DIMENSIONAL CALCULATIONS VISIBLE RADIATION |
| title | On the implementation of computed laminography using synchrotron radiation |
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