Piezoresistive cantilever force-clamp system

We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or “clamps” the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in...

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Veröffentlicht in:Review of scientific instruments 2011-04, Vol.82 (4), p.043703-043703-10
Hauptverfasser: Park, Sung-Jin, Petzold, Bryan C., Goodman, Miriam B., Pruitt, Beth L.
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container_end_page 043703-10
container_issue 4
container_start_page 043703
container_title Review of scientific instruments
container_volume 82
creator Park, Sung-Jin
Petzold, Bryan C.
Goodman, Miriam B.
Pruitt, Beth L.
description We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or “clamps” the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of μN force and nm up to tens of μm displacement) in both air and water, and excellent dynamic response (fast response time,
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subjects ACTUATORS
AIR
Animals
Caenorhabditis elegans - physiology
Calibration
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELECTRIC POTENTIAL
ELECTROMECHANICS
Equipment Design
FEEDBACK
FLEXIBILITY
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
KHZ RANGE
Mechanical Phenomena
Microscopy
Microscopy and Imaging
Movement
NEMATODES
PIEZOELECTRICITY
SENSITIVITY
SENSORS
Systems Integration
Time Factors
WATER
title Piezoresistive cantilever force-clamp system
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