The electronic structure of co-sputtered zinc indium tin oxide thin films

Zinc indium tin oxide (ZITO) transparent conductive oxide layers were deposited via radio frequency (RF) magnetron co-sputtering at room temperature. A series of samples with gradually varying zinc content was investigated. The samples were characterized with x-ray and ultraviolet photoemission spec...

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Veröffentlicht in:	Journal of applied physics 2011-10, Vol.110 (7), p.073711-073711-7
Hauptverfasser:	Carreras, Paz, Gutmann, Sebastian, Antony, Aldrin, Bertomeu, Joan, Schlaf, Rudy
Format:	Artikel
Sprache:	eng
Schlagworte:	DEPOSITION DOPED MATERIALS Electrodes ELECTRONIC STRUCTURE Elèctrodes Estany Estructura electrònica INDIUM COMPOUNDS LAYERS MATERIALS SCIENCE Metallic oxides OPACITY Optical properties Pel·lícules fines PHOTOEMISSION Propietats òptiques SEMICONDUCTOR MATERIALS SPUTTERING SURFACES THIN FILMS Tin TIN OXIDES ULTRAVIOLET RADIATION VALENCE VISIBLE RADIATION WORK FUNCTIONS X-RAY PHOTOELECTRON SPECTROSCOPY ZINC COMPOUNDS Zinc oxide Òxid de zinc Òxids metàl·lics
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