Smoothing tool design and performance during subaperture glass polishing

During subaperture tool grinding and polishing, overlaps of the tool influence function can result in undesirable mid-spatial frequency (MSF) errors in the form of surface ripples, which are often corrected using a smoothing polishing step. In this study, flat multi-layer smoothing polishing tools a...

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Veröffentlicht in:	Applied optics (2004) 2023-03, Vol.62 (8)
Hauptverfasser:	Suratwala, T., Tham, G., Steele, R., Wong, L., Menapace, J., Ray, N., Bauman, B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Optics and optical instruments OTHER INSTRUMENTATION
Online-Zugang:	Volltext
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