$Study of the spatial resolution of laser thermochemical technology for recording diffraction microstructures$

Study of the spatial resolution of laser thermochemical technology for recording diffraction microstructures

The thermochemical method for recording data, which is based on local laser oxidation of a thin metal film with subsequent etching of the unirradiated region, is an alternative to laser photolithography and direct laser removal of the film material. This recording technology is characterised by the...

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Veröffentlicht in:	Quantum electronics (Woodbury, N.Y.) N.Y.), 2011-07, Vol.41 (7), p.631-636
Hauptverfasser:	Veiko, V P, Korol'kov, V I, Poleshchuk, A G, Sametov, A R, Shakhno, E A, Yarchuk, M V
Format:	Artikel
Sprache:	eng
Schlagworte:	ABLATION CHEMICAL REACTIONS CHROMIUM COHERENT SCATTERING CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY DIFFRACTION ELEMENTS ETCHING LASERS METALS MICROSTRUCTURE OXIDATION RESOLUTION SCATTERING SPATIAL RESOLUTION SURFACE FINISHING THERMOCHEMICAL PROCESSES THIN FILMS TRANSITION ELEMENTS
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