Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry
Pulsed laser deposition technique was used for the fabrication of (GeTe) 1−x (Sb 2 Te 3 ) x (x=0, 0.33, 0.50, 0.66, and 1) amorphous thin films. Scanning electron microscopy with energy-dispersive x-ray analysis, x-ray diffraction, optical reflectivity, and sheet resistance temperature dependences a...
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| Veröffentlicht in: | Journal of applied physics 2011-04, Vol.109 (7), p.073520-073520-7 |
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| container_title | Journal of applied physics |
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| creator | Němec, P. Přikryl, J. Nazabal, V. Frumar, M. |
| description | Pulsed laser deposition technique was used for the fabrication of (GeTe)
1−x
(Sb
2
Te
3
)
x
(x=0, 0.33, 0.50, 0.66, and 1) amorphous thin films. Scanning electron microscopy with energy-dispersive x-ray analysis, x-ray diffraction, optical reflectivity, and sheet resistance temperature dependences as well as variable angle spectroscopic ellipsometry measurements were used to characterize as-deposited (amorphous) and annealed (rocksaltlike) layers. In order to extract optical functions of the films, the Cody-Lorentz model was applied for the analysis of ellipsometric data. Fitted sets of Cody-Lorentz model parameters are discussed in relation with chemical composition and the structure of the layers. The GeTe component content was found to be responsible for the huge optical functions and thickness changes upon amorphous-to-fcc phase transition. |
| doi_str_mv | 10.1063/1.3569865 |
| format | Article |
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1−x
(Sb
2
Te
3
)
x
(x=0, 0.33, 0.50, 0.66, and 1) amorphous thin films. Scanning electron microscopy with energy-dispersive x-ray analysis, x-ray diffraction, optical reflectivity, and sheet resistance temperature dependences as well as variable angle spectroscopic ellipsometry measurements were used to characterize as-deposited (amorphous) and annealed (rocksaltlike) layers. In order to extract optical functions of the films, the Cody-Lorentz model was applied for the analysis of ellipsometric data. Fitted sets of Cody-Lorentz model parameters are discussed in relation with chemical composition and the structure of the layers. The GeTe component content was found to be responsible for the huge optical functions and thickness changes upon amorphous-to-fcc phase transition.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.3569865</identifier><identifier>CODEN: JAPIAU</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>AMORPHOUS STATE ; ANNEALING ; ANTIMONY COMPOUNDS ; ANTIMONY TELLURIDES ; CHALCOGENIDES ; Chemical Sciences ; COHERENT SCATTERING ; CRYSTAL LATTICES ; CRYSTAL STRUCTURE ; CRYSTAL-PHASE TRANSFORMATIONS ; CUBIC LATTICES ; DEPOSITION ; DIFFRACTION ; ELECTROMAGNETIC RADIATION ; ELECTRON MICROSCOPY ; ELLIPSOMETRY ; ENERGY BEAM DEPOSITION ; FCC LATTICES ; GERMANIUM COMPOUNDS ; GERMANIUM TELLURIDES ; HEAT TREATMENTS ; IONIZING RADIATIONS ; IRRADIATION ; LASER RADIATION ; LAYERS ; Material chemistry ; MATERIALS SCIENCE ; MEASURING METHODS ; MICROSCOPY ; OPTICAL PROPERTIES ; PHASE TRANSFORMATIONS ; PHYSICAL PROPERTIES ; PULSED IRRADIATION ; RADIATIONS ; REFLECTIVITY ; SCANNING ELECTRON MICROSCOPY ; SCATTERING ; SOLIDS ; SURFACE COATING ; SURFACE PROPERTIES ; TELLURIDES ; TELLURIUM COMPOUNDS ; TEMPERATURE DEPENDENCE ; THIN FILMS ; X RADIATION ; X-RAY DIFFRACTION</subject><ispartof>Journal of applied physics, 2011-04, Vol.109 (7), p.073520-073520-7</ispartof><rights>2011 American Institute of Physics</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c412t-3d5845876270ccbb13619114f00acdd615a57a3f0ccd5057ff204d4d458d307d3</citedby><cites>FETCH-LOGICAL-c412t-3d5845876270ccbb13619114f00acdd615a57a3f0ccd5057ff204d4d458d307d3</cites><orcidid>0000-0002-0113-3935</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/jap/article-lookup/doi/10.1063/1.3569865$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,780,784,794,885,1559,4512,27924,27925,76384,76390</link.rule.ids><backlink>$$Uhttps://hal.science/hal-00719552$$DView record in HAL$$Hfree_for_read</backlink><backlink>$$Uhttps://www.osti.gov/biblio/21538221$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Němec, P.</creatorcontrib><creatorcontrib>Přikryl, J.</creatorcontrib><creatorcontrib>Nazabal, V.</creatorcontrib><creatorcontrib>Frumar, M.</creatorcontrib><title>Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry</title><title>Journal of applied physics</title><description>Pulsed laser deposition technique was used for the fabrication of (GeTe)
1−x
(Sb
2
Te
3
)
x
(x=0, 0.33, 0.50, 0.66, and 1) amorphous thin films. Scanning electron microscopy with energy-dispersive x-ray analysis, x-ray diffraction, optical reflectivity, and sheet resistance temperature dependences as well as variable angle spectroscopic ellipsometry measurements were used to characterize as-deposited (amorphous) and annealed (rocksaltlike) layers. In order to extract optical functions of the films, the Cody-Lorentz model was applied for the analysis of ellipsometric data. Fitted sets of Cody-Lorentz model parameters are discussed in relation with chemical composition and the structure of the layers. The GeTe component content was found to be responsible for the huge optical functions and thickness changes upon amorphous-to-fcc phase transition.</description><subject>AMORPHOUS STATE</subject><subject>ANNEALING</subject><subject>ANTIMONY COMPOUNDS</subject><subject>ANTIMONY TELLURIDES</subject><subject>CHALCOGENIDES</subject><subject>Chemical Sciences</subject><subject>COHERENT SCATTERING</subject><subject>CRYSTAL LATTICES</subject><subject>CRYSTAL STRUCTURE</subject><subject>CRYSTAL-PHASE TRANSFORMATIONS</subject><subject>CUBIC LATTICES</subject><subject>DEPOSITION</subject><subject>DIFFRACTION</subject><subject>ELECTROMAGNETIC RADIATION</subject><subject>ELECTRON MICROSCOPY</subject><subject>ELLIPSOMETRY</subject><subject>ENERGY BEAM DEPOSITION</subject><subject>FCC LATTICES</subject><subject>GERMANIUM COMPOUNDS</subject><subject>GERMANIUM TELLURIDES</subject><subject>HEAT TREATMENTS</subject><subject>IONIZING RADIATIONS</subject><subject>IRRADIATION</subject><subject>LASER RADIATION</subject><subject>LAYERS</subject><subject>Material chemistry</subject><subject>MATERIALS SCIENCE</subject><subject>MEASURING METHODS</subject><subject>MICROSCOPY</subject><subject>OPTICAL PROPERTIES</subject><subject>PHASE TRANSFORMATIONS</subject><subject>PHYSICAL PROPERTIES</subject><subject>PULSED IRRADIATION</subject><subject>RADIATIONS</subject><subject>REFLECTIVITY</subject><subject>SCANNING ELECTRON MICROSCOPY</subject><subject>SCATTERING</subject><subject>SOLIDS</subject><subject>SURFACE COATING</subject><subject>SURFACE PROPERTIES</subject><subject>TELLURIDES</subject><subject>TELLURIUM COMPOUNDS</subject><subject>TEMPERATURE DEPENDENCE</subject><subject>THIN FILMS</subject><subject>X RADIATION</subject><subject>X-RAY DIFFRACTION</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp1kE1LAzEQhoMoWKsH_0HAk4etM5vNflyEUrQKhR6s55BNsmx0u1k2qdB_b0qL9CJzGGbmma-XkHuEGULOnnDGeF6VOb8gE4SySgrO4ZJMAFJMyqqorsmN918AiCWrJuR7PQSrZEdVK0epghmtjwlPXUOHXeeNpp30ZqTaDM7bEOOlST7qZGNoaG1PG9ttPfVhp22s1XvqB6PC6Lxyg1XUdJ0dvNuaMO5vyVUj48i7k5-Sz9eXzeItWa2X74v5KlEZpiFhmpcZL4s8LUCpukaWY4WYNQBSaZ0jl7yQrIlFzYEXTZNCpqPxUjMoNJuSh-NcF18RXsWrVatc38fDRIqclWmKkXo8Uq3sxDDarRz3wkkr3uYrccgBFFhxnv6csSo-5kfT_DUgiIPuAsVJ98g-H9nDYhms6_-HT-KLc_HZL4psimQ</recordid><startdate>20110401</startdate><enddate>20110401</enddate><creator>Němec, P.</creator><creator>Přikryl, J.</creator><creator>Nazabal, V.</creator><creator>Frumar, M.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope><scope>OTOTI</scope><orcidid>https://orcid.org/0000-0002-0113-3935</orcidid></search><sort><creationdate>20110401</creationdate><title>Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry</title><author>Němec, P. ; Přikryl, J. ; Nazabal, V. ; Frumar, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c412t-3d5845876270ccbb13619114f00acdd615a57a3f0ccd5057ff204d4d458d307d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>AMORPHOUS STATE</topic><topic>ANNEALING</topic><topic>ANTIMONY COMPOUNDS</topic><topic>ANTIMONY TELLURIDES</topic><topic>CHALCOGENIDES</topic><topic>Chemical Sciences</topic><topic>COHERENT SCATTERING</topic><topic>CRYSTAL LATTICES</topic><topic>CRYSTAL STRUCTURE</topic><topic>CRYSTAL-PHASE TRANSFORMATIONS</topic><topic>CUBIC LATTICES</topic><topic>DEPOSITION</topic><topic>DIFFRACTION</topic><topic>ELECTROMAGNETIC RADIATION</topic><topic>ELECTRON MICROSCOPY</topic><topic>ELLIPSOMETRY</topic><topic>ENERGY BEAM DEPOSITION</topic><topic>FCC LATTICES</topic><topic>GERMANIUM COMPOUNDS</topic><topic>GERMANIUM TELLURIDES</topic><topic>HEAT TREATMENTS</topic><topic>IONIZING RADIATIONS</topic><topic>IRRADIATION</topic><topic>LASER RADIATION</topic><topic>LAYERS</topic><topic>Material chemistry</topic><topic>MATERIALS SCIENCE</topic><topic>MEASURING METHODS</topic><topic>MICROSCOPY</topic><topic>OPTICAL PROPERTIES</topic><topic>PHASE TRANSFORMATIONS</topic><topic>PHYSICAL PROPERTIES</topic><topic>PULSED IRRADIATION</topic><topic>RADIATIONS</topic><topic>REFLECTIVITY</topic><topic>SCANNING ELECTRON MICROSCOPY</topic><topic>SCATTERING</topic><topic>SOLIDS</topic><topic>SURFACE COATING</topic><topic>SURFACE PROPERTIES</topic><topic>TELLURIDES</topic><topic>TELLURIUM COMPOUNDS</topic><topic>TEMPERATURE DEPENDENCE</topic><topic>THIN FILMS</topic><topic>X RADIATION</topic><topic>X-RAY DIFFRACTION</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Němec, P.</creatorcontrib><creatorcontrib>Přikryl, J.</creatorcontrib><creatorcontrib>Nazabal, V.</creatorcontrib><creatorcontrib>Frumar, M.</creatorcontrib><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>OSTI.GOV</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Němec, P.</au><au>Přikryl, J.</au><au>Nazabal, V.</au><au>Frumar, M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry</atitle><jtitle>Journal of applied physics</jtitle><date>2011-04-01</date><risdate>2011</risdate><volume>109</volume><issue>7</issue><spage>073520</spage><epage>073520-7</epage><pages>073520-073520-7</pages><issn>0021-8979</issn><eissn>1089-7550</eissn><coden>JAPIAU</coden><abstract>Pulsed laser deposition technique was used for the fabrication of (GeTe)
1−x
(Sb
2
Te
3
)
x
(x=0, 0.33, 0.50, 0.66, and 1) amorphous thin films. Scanning electron microscopy with energy-dispersive x-ray analysis, x-ray diffraction, optical reflectivity, and sheet resistance temperature dependences as well as variable angle spectroscopic ellipsometry measurements were used to characterize as-deposited (amorphous) and annealed (rocksaltlike) layers. In order to extract optical functions of the films, the Cody-Lorentz model was applied for the analysis of ellipsometric data. Fitted sets of Cody-Lorentz model parameters are discussed in relation with chemical composition and the structure of the layers. The GeTe component content was found to be responsible for the huge optical functions and thickness changes upon amorphous-to-fcc phase transition.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><doi>10.1063/1.3569865</doi><orcidid>https://orcid.org/0000-0002-0113-3935</orcidid></addata></record> |
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| ispartof | Journal of applied physics, 2011-04, Vol.109 (7), p.073520-073520-7 |
| issn | 0021-8979 1089-7550 |
| language | eng |
| recordid | cdi_osti_scitechconnect_21538221 |
| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | AMORPHOUS STATE ANNEALING ANTIMONY COMPOUNDS ANTIMONY TELLURIDES CHALCOGENIDES Chemical Sciences COHERENT SCATTERING CRYSTAL LATTICES CRYSTAL STRUCTURE CRYSTAL-PHASE TRANSFORMATIONS CUBIC LATTICES DEPOSITION DIFFRACTION ELECTROMAGNETIC RADIATION ELECTRON MICROSCOPY ELLIPSOMETRY ENERGY BEAM DEPOSITION FCC LATTICES GERMANIUM COMPOUNDS GERMANIUM TELLURIDES HEAT TREATMENTS IONIZING RADIATIONS IRRADIATION LASER RADIATION LAYERS Material chemistry MATERIALS SCIENCE MEASURING METHODS MICROSCOPY OPTICAL PROPERTIES PHASE TRANSFORMATIONS PHYSICAL PROPERTIES PULSED IRRADIATION RADIATIONS REFLECTIVITY SCANNING ELECTRON MICROSCOPY SCATTERING SOLIDS SURFACE COATING SURFACE PROPERTIES TELLURIDES TELLURIUM COMPOUNDS TEMPERATURE DEPENDENCE THIN FILMS X RADIATION X-RAY DIFFRACTION |
| title | Optical characteristics of pulsed laser deposited Ge-Sb-Te thin films studied by spectroscopic ellipsometry |
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