Integration Of SIMS Into A General Purpose IBA Data Analysis Code

IBA techniques such as RBS, ERDA, NRA, or PIXE are highly complementary, and are often combined to maximize the extracted information. In particular, they have different sensitivities to various elements and probe different depth scales. The same is true for secondary ion mass spectrometry (SIMS), that can have much better detection limits for many species. Quantification of SIMS data normally requires careful calibration of the exact system being studied, and often the results are only semi-quantitative. Nevertheless, when SIMS is used together with other IBA techniques, it would be highly desirable to integrate the data analysis. We developed a routine to analyse SIMS data, and implemented it in NDF, a standard IBA data analysis code, that already supported RBS, ERDA, resonant and non-resonant NRA, and PIXE. Details of this new routine are presented in this work.