Disentangling fluxes of energy and matter in plasma-surface interactions: Effect of process parameters

The possibility to discriminate between the relative importance of the fluxes of energy and matter in plasma-surface interaction is demonstrated by the energy flux measurements in low-temperature plasmas ignited by the radio frequency discharge (power and pressure ranges 50-250 W and 8-11.5 Pa) in A...

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Veröffentlicht in:	Journal of applied physics 2010-09, Vol.108 (5), p.053302-053302-5
Hauptverfasser:	Wolter, M., Levchenko, I., Kersten, H., Kumar, S., Ostrikov, K.
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY ALKANES ARGON CARBON CARBON COMPOUNDS DISPERSIONS ELECTRIC DISCHARGES ELECTROMAGNETIC RADIATION ELECTRON TEMPERATURE ELEMENTS FLUIDS GASES HIGH-FREQUENCY DISCHARGES HYDROCARBONS HYDROGEN ION TEMPERATURE METHANE MIXTURES NONMETALS ORGANIC COMPOUNDS PLASMA PLASMA PRESSURE RADIATIONS RADIOWAVE RADIATION RARE GASES SEMIMETALS SILICON SURFACES WALL EFFECTS
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