On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses

The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSSs) on single-crystalline silicon upon irradiation with single or multiple femtosecond-laser pulses (pulse duration τ = 130   fs and central wavelength λ = 800   nm ) in air is studied experimentally and theoreti...

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Veröffentlicht in:Journal of applied physics 2009-11, Vol.106 (10), p.104910-104910-5
Hauptverfasser: Bonse, Jörn, Rosenfeld, Arkadi, Krüger, Jörg
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Sprache:eng
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