Conformal Doping of FINFETs: a Fabrication and Metrology Challenge

Whereas the introduction of 3D-dimensional devices such as FINFETs may be a solution for next generation technologies, they do represent significant challenges with respect to the doping strategies and the junction characterization. Aiming at a conformal doping, classical beam implants fail due to t...

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Bibliographische Detailangaben

Hauptverfasser:	Vandervorst, W., Mody, J., Zschaetzsch, G., Koelling, S., Instituut voor Kern- and Stralings Fysika, K.U. Leuven, Leuven, Everaert, J. L., Rosseel, E., Jurczak, M., Hoffman, T., Eyben, P., Gilbert, M., Poon, T., Del Agua Borniquel, J., Foad, M., Duffy, R., Pawlak, B. J.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS COATINGS DEPOSITION DIFFUSION EROSION FABRICATION ION IMPLANTATION ION MICROPROBE ANALYSIS MASS SPECTROSCOPY MICROSCOPY RESISTORS SPUTTERING
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