Quantitative characterization of solid state phases by secondary neutral mass spectrometry
The quantitative determination of chemical solid phases by secondary neutral mass spectrometry (SNMS) based on the quantitative character of this technique is described and demonstrated for several thin film structures. The intermetallic phases in a Ni-Zn coating on Fe are shown to be achieved direc...
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| Veröffentlicht in: | Journal of applied physics 2009-03, Vol.105 (6), p.063523-063523-6 |
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| container_end_page | 063523-6 |
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| container_issue | 6 |
| container_start_page | 063523 |
| container_title | Journal of applied physics |
| container_volume | 105 |
| creator | Oechsner, H. Getto, R. Kopnarski, M. |
| description | The quantitative determination of chemical solid phases by secondary neutral mass spectrometry (SNMS) based on the quantitative character of this technique is described and demonstrated for several thin film structures. The intermetallic phases in a Ni-Zn coating on Fe are shown to be achieved directly from the concentration ratios determined by SNMS. When correlating the local elemental concentration tupels with the corresponding phase fractions by a matrix equation, the determination of chemical solid phase depth profiles becomes possible. This is exemplified by the detection of temperature induced chemical phases in Ni and Ti/Si films on SiC substrates. |
| doi_str_mv | 10.1063/1.3099595 |
| format | Article |
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The intermetallic phases in a Ni-Zn coating on Fe are shown to be achieved directly from the concentration ratios determined by SNMS. When correlating the local elemental concentration tupels with the corresponding phase fractions by a matrix equation, the determination of chemical solid phase depth profiles becomes possible. 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The intermetallic phases in a Ni-Zn coating on Fe are shown to be achieved directly from the concentration ratios determined by SNMS. When correlating the local elemental concentration tupels with the corresponding phase fractions by a matrix equation, the determination of chemical solid phase depth profiles becomes possible. This is exemplified by the detection of temperature induced chemical phases in Ni and Ti/Si films on SiC substrates.</description><subject>CONCENTRATION RATIO</subject><subject>EQUATIONS</subject><subject>INTERMETALLIC COMPOUNDS</subject><subject>MASS SPECTROSCOPY</subject><subject>MATERIALS SCIENCE</subject><subject>NICKEL ALLOYS</subject><subject>SILICON CARBIDES</subject><subject>SUBSTRATES</subject><subject>THIN FILMS</subject><subject>ZINC ALLOYS</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNp1kE1LAzEQhoMoWKsH_0HAk4etM5tmk1wEKX5BQQS9eAnZbJZG2t2SSYX6693aHrx4GmZ4eHnnYewSYYJQiRucCDBGGnnERgjaFEpKOGYjgBILbZQ5ZWdEnwCIWpgR-3jduC7H7HL8CtwvXHI-hxS_h0Pf8b7l1C9jw2kgAl8vHAXi9ZZT8H3XuLTlXdjk5JZ85Yg4rYPPqV-FnLbn7KR1SwoXhzlm7w_3b7OnYv7y-Dy7mxdeYJkLrMGDqbESWLlGeUSQVaW1U62pTYuNdr72UIepVqJW7VToSjeqlHKqyt06Zlf73J5ytORjDn4xtOuGKrZENABaD9T1nvKpJ0qhtesUV8MDFsHu1Fm0B3UDe7tnd2G_Iv6H__qzB3_iB7dedzs</recordid><startdate>20090315</startdate><enddate>20090315</enddate><creator>Oechsner, H.</creator><creator>Getto, R.</creator><creator>Kopnarski, M.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20090315</creationdate><title>Quantitative characterization of solid state phases by secondary neutral mass spectrometry</title><author>Oechsner, H. ; Getto, R. ; Kopnarski, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c312t-1b0c09b16316ad7c11056688a7f9b9f1d8acbc0be4873b7f43868d72554727f43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>CONCENTRATION RATIO</topic><topic>EQUATIONS</topic><topic>INTERMETALLIC COMPOUNDS</topic><topic>MASS SPECTROSCOPY</topic><topic>MATERIALS SCIENCE</topic><topic>NICKEL ALLOYS</topic><topic>SILICON CARBIDES</topic><topic>SUBSTRATES</topic><topic>THIN FILMS</topic><topic>ZINC ALLOYS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Oechsner, H.</creatorcontrib><creatorcontrib>Getto, R.</creatorcontrib><creatorcontrib>Kopnarski, M.</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Oechsner, H.</au><au>Getto, R.</au><au>Kopnarski, M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Quantitative characterization of solid state phases by secondary neutral mass spectrometry</atitle><jtitle>Journal of applied physics</jtitle><date>2009-03-15</date><risdate>2009</risdate><volume>105</volume><issue>6</issue><spage>063523</spage><epage>063523-6</epage><pages>063523-063523-6</pages><issn>0021-8979</issn><eissn>1089-7550</eissn><coden>JAPIAU</coden><abstract>The quantitative determination of chemical solid phases by secondary neutral mass spectrometry (SNMS) based on the quantitative character of this technique is described and demonstrated for several thin film structures. The intermetallic phases in a Ni-Zn coating on Fe are shown to be achieved directly from the concentration ratios determined by SNMS. When correlating the local elemental concentration tupels with the corresponding phase fractions by a matrix equation, the determination of chemical solid phase depth profiles becomes possible. This is exemplified by the detection of temperature induced chemical phases in Ni and Ti/Si films on SiC substrates.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><doi>10.1063/1.3099595</doi></addata></record> |
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| identifier | ISSN: 0021-8979 |
| ispartof | Journal of applied physics, 2009-03, Vol.105 (6), p.063523-063523-6 |
| issn | 0021-8979 1089-7550 |
| language | eng |
| recordid | cdi_osti_scitechconnect_21190088 |
| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | CONCENTRATION RATIO EQUATIONS INTERMETALLIC COMPOUNDS MASS SPECTROSCOPY MATERIALS SCIENCE NICKEL ALLOYS SILICON CARBIDES SUBSTRATES THIN FILMS ZINC ALLOYS |
| title | Quantitative characterization of solid state phases by secondary neutral mass spectrometry |
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