The formation of light emitting cerium silicates in cerium-doped silicon oxides

Cerium-doped silicon oxides with cerium concentrations of up to 0.9 at. % were deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition. Bright cerium related photoluminescence, easily seen even under room lighting conditions, was observed from the films and found to be se...

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Veröffentlicht in:	Applied physics letters 2009-01, Vol.94 (1)
Hauptverfasser:	Li, Jing, Zalloum, Othman, Roschuk, Tyler, Heng, Chenglin, Wojcik, Jacek, Mascher, Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	ANNEALING CERIUM CERIUM SILICATES CHEMICAL VAPOR DEPOSITION DOPED MATERIALS ELECTRON CYCLOTRON-RESONANCE MATERIALS SCIENCE PHOTOLUMINESCENCE SILICON OXIDES THIN FILMS TRANSMISSION ELECTRON MICROSCOPY
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