Absence of amorphous phase in high power femtosecond laser-ablated silicon

As femtosecond lasers emerge as viable tools for advanced microscale materials processing, it becomes increasingly important to understand the characteristics of materials resulting from femtosecond laser microablation or micromachining. We conducted transmission electron microscopy experiments to i...

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Veröffentlicht in:	Applied physics letters 2009-01, Vol.94 (1), p.011111-011111-3
Hauptverfasser:	Rogers, Matthew S., Grigoropoulos, Costas P., Minor, Andrew M., Mao, Samuel S.
Format:	Artikel
Sprache:	eng
Schlagworte:	ABLATION AMORPHOUS STATE LASERS LAYERS MATERIALS SCIENCE MONOCRYSTALS SEMICONDUCTOR MATERIALS SILICON TRANSMISSION ELECTRON MICROSCOPY
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