Homogeneous growth of antidot structures electrodeposited on Si by nanosphere lithography

The characteristics of cobalt antidot structures, electrodeposited on Si by nanosphere lithography, is investigated by analysis of current transients and optical and atomic force microscopy. Polystyrene colloidal masks of 1 ML (monolayer) or a maximum of 2, with sphere diameters ranging between 165...

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Veröffentlicht in:Journal of applied physics 2008-06, Vol.103 (11), p.114306-114306-5
Hauptverfasser: Spada, Edna R., da Rocha, Alexsandro S., Jasinski, Everton F., Pereira, Guilherme M. C., Chavero, Lucas N., Oliveira, Alexandre B., Azevedo, Antonio, Sartorelli, Maria Luisa
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container_end_page 114306-5
container_issue 11
container_start_page 114306
container_title Journal of applied physics
container_volume 103
creator Spada, Edna R.
da Rocha, Alexsandro S.
Jasinski, Everton F.
Pereira, Guilherme M. C.
Chavero, Lucas N.
Oliveira, Alexandre B.
Azevedo, Antonio
Sartorelli, Maria Luisa
description The characteristics of cobalt antidot structures, electrodeposited on Si by nanosphere lithography, is investigated by analysis of current transients and optical and atomic force microscopy. Polystyrene colloidal masks of 1 ML (monolayer) or a maximum of 2, with sphere diameters ranging between 165 and 600 nm were fabricated by spin coating. For masks partially covered with bilayer regions, it is shown that the volume of deposited material in bilayer areas corresponds to only 5% of the cobalt deposited in the monolayer areas. This drastic reduction in the deposition rate affects the quality of the deposit. Therefore, the use of colloidal masks of homogeneous thickness is necessary to guarantee the electrodeposition of nanostructured films of controlled thickness. It will also be shown that the use of high quality colloidal masks yields a reproducible electrodeposition process, enabling the use of the current transient as a reliable tool for assessment of the deposition process.
doi_str_mv 10.1063/1.2937083
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subjects ATOMIC FORCE MICROSCOPY
COBALT
CRYSTAL GROWTH
ELECTRODEPOSITION
MATERIALS SCIENCE
POLYSTYRENE
QUANTUM DOTS
SILICON
THIN FILMS
title Homogeneous growth of antidot structures electrodeposited on Si by nanosphere lithography
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