Study of a micro chamber quadrupole mass spectrometer

The design of a micro chamber quadrupole mass spectrometer (MCQMS) having a small total volume of only 20 cm 3 , including Faraday cup ion detector and ion source, is described. This MCQMS can resist a vacuum baking temperature of 400 – 500 ° C . The quadrupole elements with a hyperbolic surface...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2008-03, Vol.26 (2), p.239-243
Hauptverfasser:	Wang, Jinchan, Zhang, Xiaobing, Mao, Fuming, Xiao, Mei, Cui, Yunkang, den Engelsen, Daniel, Lei, Wei
Format:	Artikel
Sprache:	eng
Schlagworte:	CERAMICS DESIGN ELECTRONS FARADAY CUPS FILTERS GAS ANALYSIS HEIGHT INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY ION SOURCES IONS LAYERS MASS NUMBER MASS SPECTROMETERS METALS PARTIAL PRESSURE PEAKS QUADRUPOLES WIDTH
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