Experimental study of Cr/Sc multilayer mirrors for the nitrogen K{sub {alpha}}-emission line

The authors present an experimental study of Cr/Sc multilayer mirrors optimized for the detection of the nitrogen K{sub {alpha}}-emission line ({lambda}=3.16 nm) at a grazing incidence around 23 deg., for electron probe microanalysis applications. The multilayers were deposited onto silicon substrat...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2008-05, Vol.26 (3)
Hauptverfasser:	Hardouin, Aurelie, Delmotte, Franck, Ravet, Marie Francoise, Bridou, Francoise, Jerome, Arnaud, Varniere, Francoise, Montcalm, Claude, Hedacq, Sebastien, Gullikson, Eric, Aubert, Pascal, Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Universite Paris-Sud, Campus Polytechnique, RD128, 91127 Palaiseau cedex, Xenocs SA, 19 rue Francois Blumet, 38360 Sassenage, Lawrence Berkeley National Laboratory, Berkeley, California 94720, Laboratoire Multicouches Nanometriques, Universite d'Evry Val d'Essonne, Batiment Maupertuis, rue du Pere Jarlan-91025 Evry cedex
Format:	Artikel
Sprache:	eng
Schlagworte:	ATOMIC FORCE MICROSCOPY COPPER ELECTRON MICROPROBE ANALYSIS EMISSION LAYERS MAGNETRONS MATERIALS SCIENCE MIRRORS NITROGEN REFLECTIVITY STRONTIUM SURFACE COATING SYNCHROTRON RADIATION X RADIATION
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