Testing of Radiation Hardness in the Extreme-Ultraviolet Spectral Region

Currently we are commissioning a second multilayer-based beamline to study the radiation hardness of multilayers under extreme-ultraviolet (EUV) irradiation in an oxidizing atmosphere. Multilayer lifetime is one of the most important issues for the commercialization of extreme-ultraviolet lithograph...

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Bibliographische Detailangaben
Hauptverfasser:	Arp, U, Ermanoski, I, Tarrio, C, Grantham, S, Hill, S, Dhez, P, Lucatorto, T B
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	BEAM PRODUCTION BERYLLIUM COMMISSIONING EXTREME ULTRAVIOLET RADIATION FILTERS IRRADIATION LAYERS MASKING MIRRORS PARTICLE ACCELERATORS PHOTON BEAMS PHYSICAL RADIATION EFFECTS SPHERICAL CONFIGURATION STORAGE RINGS TESTING ULTRAVIOLET SPECTRA
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