Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere

We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a 200 μ m diameter at 9 mA and the optimum value of gas velocity × diameter for hollow cathode effect wa...

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Veröffentlicht in:Applied physics letters 2008-02, Vol.92 (6), p.061503-061503-3
Hauptverfasser: Park, Ki Wan, Lee, Tae Il, Hwang, Hyeon Seok, Noh, Joo Hyon, Baik, Hong Koo, Song, Kie Moon
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container_end_page 061503-3
container_issue 6
container_start_page 061503
container_title Applied physics letters
container_volume 92
creator Park, Ki Wan
Lee, Tae Il
Hwang, Hyeon Seok
Noh, Joo Hyon
Baik, Hong Koo
Song, Kie Moon
description We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a 200 μ m diameter at 9 mA and the optimum value of gas velocity × diameter for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of E ∕ N strength for 200 μ m ( 0.31 m 2 ∕ s ) and 500 μ m ( 0.78 m 2 ∕ s ) air discharge at 8 mA under the velocity of 156 m ∕ s . As a result, an increase of 46.7% in E ∕ N strength of the discharge of 200 μ m hole was obtained compare to that of 500 μ m .
doi_str_mv 10.1063/1.2842427
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ispartof Applied physics letters, 2008-02, Vol.92 (6), p.061503-061503-3
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1077-3118
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source AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection
subjects AIR
ATMOSPHERES
ATMOSPHERIC PRESSURE
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
DIRECT CURRENT
GAS FLOW
GLOW DISCHARGES
HOLLOW CATHODES
PLASMA
VELOCITY
title Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere
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