Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere
We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a 200 μ m diameter at 9 mA and the optimum value of gas velocity × diameter for hollow cathode effect wa...
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Veröffentlicht in: | Applied physics letters 2008-02, Vol.92 (6), p.061503-061503-3 |
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container_end_page | 061503-3 |
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container_issue | 6 |
container_start_page | 061503 |
container_title | Applied physics letters |
container_volume | 92 |
creator | Park, Ki Wan Lee, Tae Il Hwang, Hyeon Seok Noh, Joo Hyon Baik, Hong Koo Song, Kie Moon |
description | We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a
200
μ
m
diameter at
9
mA
and the optimum value of gas
velocity
×
diameter
for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of
E
∕
N
strength for
200
μ
m
(
0.31
m
2
∕
s
)
and
500
μ
m
(
0.78
m
2
∕
s
)
air discharge at
8
mA
under the velocity of
156
m
∕
s
. As a result, an increase of 46.7% in
E
∕
N
strength of the discharge of
200
μ
m
hole was obtained compare to that of
500
μ
m
. |
doi_str_mv | 10.1063/1.2842427 |
format | Article |
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200
μ
m
diameter at
9
mA
and the optimum value of gas
velocity
×
diameter
for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of
E
∕
N
strength for
200
μ
m
(
0.31
m
2
∕
s
)
and
500
μ
m
(
0.78
m
2
∕
s
)
air discharge at
8
mA
under the velocity of
156
m
∕
s
. As a result, an increase of 46.7% in
E
∕
N
strength of the discharge of
200
μ
m
hole was obtained compare to that of
500
μ
m
.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.2842427</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>AIR ; ATMOSPHERES ; ATMOSPHERIC PRESSURE ; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ; DIRECT CURRENT ; GAS FLOW ; GLOW DISCHARGES ; HOLLOW CATHODES ; PLASMA ; VELOCITY</subject><ispartof>Applied physics letters, 2008-02, Vol.92 (6), p.061503-061503-3</ispartof><rights>2008 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c311t-433e7c67c9a5d547e3ccf9ea40fcadeff515b374fc97cf1542667a5383bdb0483</citedby><cites>FETCH-LOGICAL-c311t-433e7c67c9a5d547e3ccf9ea40fcadeff515b374fc97cf1542667a5383bdb0483</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.2842427$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,780,784,794,885,1559,4512,27924,27925,76384,76390</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/21016326$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Park, Ki Wan</creatorcontrib><creatorcontrib>Lee, Tae Il</creatorcontrib><creatorcontrib>Hwang, Hyeon Seok</creatorcontrib><creatorcontrib>Noh, Joo Hyon</creatorcontrib><creatorcontrib>Baik, Hong Koo</creatorcontrib><creatorcontrib>Song, Kie Moon</creatorcontrib><title>Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere</title><title>Applied physics letters</title><description>We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a
200
μ
m
diameter at
9
mA
and the optimum value of gas
velocity
×
diameter
for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of
E
∕
N
strength for
200
μ
m
(
0.31
m
2
∕
s
)
and
500
μ
m
(
0.78
m
2
∕
s
)
air discharge at
8
mA
under the velocity of
156
m
∕
s
. As a result, an increase of 46.7% in
E
∕
N
strength of the discharge of
200
μ
m
hole was obtained compare to that of
500
μ
m
.</description><subject>AIR</subject><subject>ATMOSPHERES</subject><subject>ATMOSPHERIC PRESSURE</subject><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><subject>DIRECT CURRENT</subject><subject>GAS FLOW</subject><subject>GLOW DISCHARGES</subject><subject>HOLLOW CATHODES</subject><subject>PLASMA</subject><subject>VELOCITY</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNp10EFLwzAYxvEgCs7pwW8Q8OShM2naZj14kOFUGHjRc0jfvlkjbTOSTNnVT25rhzdPIfDjhedPyDVnC84KcccX6TJLs1SekBlnUiaC8-UpmTHGRFKUOT8nFyF8DN88FWJGvtfOdzpa11NnaIi6apHW1iNECnvvsY-0s-Bd49rWfVHQsXH1SAI02m-RVgf6Oai9t3SrAzWjCocQsaPGeeqxcxHprtWh0zS4vQektqc6di7sGvR4Sc6MbgNeHd85eV8_vq2ek83r08vqYZPAsCEmmRAooZBQ6rzOM4kCwJSoM2ZA12hMzvNKyMxAKcHwPEuLQupcLEVVVyxbijm5me66EK0KYCNCA67vh60q5YwXIi0GdTupYXMIHo3aedtpf1CcqTGx4uqYeLD3kx2P_Ub8H_91Vs6oqbP4ARdQhig</recordid><startdate>20080211</startdate><enddate>20080211</enddate><creator>Park, Ki Wan</creator><creator>Lee, Tae Il</creator><creator>Hwang, Hyeon Seok</creator><creator>Noh, Joo Hyon</creator><creator>Baik, Hong Koo</creator><creator>Song, Kie Moon</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20080211</creationdate><title>Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere</title><author>Park, Ki Wan ; Lee, Tae Il ; Hwang, Hyeon Seok ; Noh, Joo Hyon ; Baik, Hong Koo ; Song, Kie Moon</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c311t-433e7c67c9a5d547e3ccf9ea40fcadeff515b374fc97cf1542667a5383bdb0483</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>AIR</topic><topic>ATMOSPHERES</topic><topic>ATMOSPHERIC PRESSURE</topic><topic>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</topic><topic>DIRECT CURRENT</topic><topic>GAS FLOW</topic><topic>GLOW DISCHARGES</topic><topic>HOLLOW CATHODES</topic><topic>PLASMA</topic><topic>VELOCITY</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Park, Ki Wan</creatorcontrib><creatorcontrib>Lee, Tae Il</creatorcontrib><creatorcontrib>Hwang, Hyeon Seok</creatorcontrib><creatorcontrib>Noh, Joo Hyon</creatorcontrib><creatorcontrib>Baik, Hong Koo</creatorcontrib><creatorcontrib>Song, Kie Moon</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Park, Ki Wan</au><au>Lee, Tae Il</au><au>Hwang, Hyeon Seok</au><au>Noh, Joo Hyon</au><au>Baik, Hong Koo</au><au>Song, Kie Moon</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere</atitle><jtitle>Applied physics letters</jtitle><date>2008-02-11</date><risdate>2008</risdate><volume>92</volume><issue>6</issue><spage>061503</spage><epage>061503-3</epage><pages>061503-061503-3</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>We introduce a microhollow cathode configuration with venturi gas flow to ambient air in order to obtain glow discharge at atmospheric pressure. Stable microhollow cathode discharge was formed in a
200
μ
m
diameter at
9
mA
and the optimum value of gas
velocity
×
diameter
for hollow cathode effect was obtained in our system. In order to confirm hollow cathode effect, we measured the enhancement of
E
∕
N
strength for
200
μ
m
(
0.31
m
2
∕
s
)
and
500
μ
m
(
0.78
m
2
∕
s
)
air discharge at
8
mA
under the velocity of
156
m
∕
s
. As a result, an increase of 46.7% in
E
∕
N
strength of the discharge of
200
μ
m
hole was obtained compare to that of
500
μ
m
.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><doi>10.1063/1.2842427</doi></addata></record> |
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identifier | ISSN: 0003-6951 |
ispartof | Applied physics letters, 2008-02, Vol.92 (6), p.061503-061503-3 |
issn | 0003-6951 1077-3118 |
language | eng |
recordid | cdi_osti_scitechconnect_21016326 |
source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
subjects | AIR ATMOSPHERES ATMOSPHERIC PRESSURE CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS DIRECT CURRENT GAS FLOW GLOW DISCHARGES HOLLOW CATHODES PLASMA VELOCITY |
title | Formation of stable direct current microhollow cathode discharge by venturi gas flow system for remote plasma source in atmosphere |
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