Cantilever spring constant calibration using laser Doppler vibrometry

Uncertainty in cantilever spring constants is a critical issue in atomic force microscopy (AFM) force measurements. Though numerous methods exist for calibrating cantilever spring constants, the accuracy of these methods can be limited by both the physical models themselves as well as uncertainties...

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Veröffentlicht in:Review of scientific instruments 2007-06, Vol.78 (6), p.063701-063701-5
1. Verfasser: Ohler, Benjamin
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description Uncertainty in cantilever spring constants is a critical issue in atomic force microscopy (AFM) force measurements. Though numerous methods exist for calibrating cantilever spring constants, the accuracy of these methods can be limited by both the physical models themselves as well as uncertainties in their experimental implementation. Here we report the results from two of the most common calibration methods, the thermal tune method and the Sader method. These were implemented on a standard AFM system as well as using laser Doppler vibrometry (LDV). Using LDV eliminates some uncertainties associated with optical lever detection on an AFM. It also offers considerably higher signal to noise deflection measurements. We find that AFM and LDV result in similar uncertainty in the calibrated spring constants, about 5%, using either the thermal tune or Sader methods provided that certain limitations of the methods and instrumentation are observed.
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subjects ACCURACY
ATOMIC FORCE MICROSCOPY
CALIBRATION
Equipment Design
Equipment Failure Analysis - instrumentation
Equipment Failure Analysis - methods
Equipment Failure Analysis - standards
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
Laser-Doppler Flowmetry - methods
Laser-Doppler Flowmetry - standards
LASERS
Microscopy, Atomic Force - instrumentation
Microscopy, Atomic Force - methods
Microscopy, Atomic Force - standards
NOISE
Reproducibility of Results
Sensitivity and Specificity
SIGNALS
SPRINGS
Transducers
United States
Vibration
title Cantilever spring constant calibration using laser Doppler vibrometry
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