Plasma Diagnostics in High Density Reactors

Langmuir electric probes and optical emission spectroscopy diagnostics were developed for applications in high density plasmas. These diagnostics were employed in two plasma sources: an electron cyclotron resonance (ECR) plasma and an RF driven inductively coupled plasma (ICP) plasma. Langmuir probe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Daltrini, A M, Moshkalyov, S, Monteiro, M J R, MacHida, M, Kostryukov, A, Besseler, E, Biasotto, C, Diniz, J A
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY ELECTRON CYCLOTRON-RESONANCE ELECTRONS EMISSION SPECTROSCOPY LANGMUIR PROBE PLASMA PLASMA DENSITY PLASMA DIAGNOSTICS PLASMA PRODUCTION SPATIAL DISTRIBUTION
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