$Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)∕Si(C) superlattice structures. II. High resolution reconstruction using neural network root finder technique$

Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)∕Si(C) superlattice structures. II. High resolution reconstruction using neural network root finder technique

A neural network root finder approach for finding complex roots of high-degree complex polynomials was applied as part of the phase-retrieval x-ray diffractometry technique to reconstruct strain profiles in SiGe(C)∕Si(C) superlattice structures. The high spatial resolution, 5Å, as a result of signif...

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Veröffentlicht in:	Journal of applied physics 2006-06, Vol.99 (11)
Hauptverfasser:	Dilanian, Ruben A., Nikulin, Andrei Y., Darahanau, Aliaksandr V., Hester, James, Zaumseil, Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	CARBON DOPED MATERIALS GERMANIUM ALLOYS GERMANIUM SILICIDES MATERIALS SCIENCE NEURAL NETWORKS POLYNOMIALS SEMICONDUCTOR MATERIALS SILICON SILICON ALLOYS SPATIAL RESOLUTION SUPERLATTICES X-RAY DIFFRACTION
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